Resonator element, resonator, electronic device and electronic apparatus

Patent metadata

Field	Value
Publication number	US-9231183-B2
Application number	US-201313845646-A
Country	US
Kind code	B2
Filing date	Mar 18, 2013
Priority date	Mar 19, 2012
Publication date	Jan 5, 2016
Grant date	Jan 5, 2016

Abstract

When a length along a vibrating direction of the thickness shear vibration of a multi-stage type mesa substrate of A resonator element is x, a thickness of the vibration section is t, and a distance between the vibration section and the bonding region is y, y is in a range of −0.0151×(x/t)+0.3471≦y≦−0.0121×(x/t)+0.3471.

First claim

What is claimed is:

1. A resonator element comprising:
a substrate including a vibration section that vibrates in a thickness shear vibration mode and has a step on a side surface, an outer edge that is disposed along an outer side of the vibration section and has a thickness thinner than that of the vibration section; and a bonding region that is provided on the outer edge and allows a bonding agent to be bonded for fixing to the mounting substrate;
wherein when a length along a vibrating direction of the thickness shear vibration of the substrate is x, a thickness of the vibration section is t, and a distance between closest edges of the vibration section and the bonding region in a plan view is Lx, Lx is in a range of −0.0151×(x/t)+0.3471≦Lx≦−0.0121×(x/t)+0.3471, and
wherein when a difference between the thickness of the vibration section and the thickness of the outer edge is Md, and a percentage of a ratio of the Md to the t is z, a relationship of −5≦z+1.32×(x/t)−42.87(%) is satisfied.

2. The resonator element according to claim 1 , wherein the relationship of −5≦z+1.32×(x/t)−42.87≦5(%) is satisfied.

3. The resonator element according to claim 1 , wherein an edge ratio (x/t) of the x to the t is 30 or less.

4. The resonator element according to claim 1 , wherein the substrate is a Y-cut quartz crystal substrate that is cut out from a material along a plane on which an XZ lane is rotated around an X axis by an angle θ.

5. A resonator comprising:
the resonator element according to claim 1 ; and
a package that accommodates the resonator element.

6. A resonator comprising:
the resonator element according to claim 2 ; and
a package that accommodates the resonator element.

7. An electronic device comprising:
the resonator element according to claim 1 ; and
an electronic element.

8. An electronic device comprising:
the resonator element according to claim 2 ; and
an electronic element.

9. An electronic apparatus comprising the resonator element according to claim 1 .

10. An electronic apparatus comprising the resonator element according to claim 2 .

Assignees

• Seiko Epson Corp

Inventors

• Naito Matsutaro
• Endo Hideo

Classifications

• H03H9/02157

  Dimensional parameters, e.g. ratio between two dimension parameters, length, width or thickness · CPC title

• H03H9/02062 Primary

  Details relating to the vibration mode · CPC title

• H03H9/177

  of the energy-trap type · CPC title

• H03H9/19

  consisting of quartz · CPC title

• H01L41/053 Primary

  Electricity · mapped topic