Resonator, resonator device, oscillator, electronic apparatus, and moving object

Patent metadata

Field	Value
Publication number	US-9577574-B2
Application number	US-201615017938-A
Country	US
Kind code	B2
Filing date	Feb 8, 2016
Priority date	Feb 17, 2015
Publication date	Feb 21, 2017
Grant date	Feb 21, 2017

Abstract

A resonator includes: a resonator element including a quartz crystal substrate that includes a first area performing a thickness-shear vibration and a second area with a thickness thinner than the first area and located around the first area; and a base substrate to which the second area of the resonator element on one edge side thereof is attached via a bonding material. The quartz crystal substrate has a major surface that is a surface including an X-axis and a Z′-axis, and has a thickness in a direction along a Y′-axis. The resonator satisfies the relation: 1.5×λ≦Xp where Xp is the maximum length of an area of the second area where the bonding material is bonded along the X-axis in a plan view and λ is the wavelength of a flexural vibration occurring in the quartz crystal substrate.

First claim

What is claimed is:

1. A resonator comprising:
a resonator element including a quartz crystal substrate that includes a first area performing a thickness-shear vibration and a second area with a thickness thinner than the first area and located around the first area; and
a base substrate to which the second area of the resonator element on one edge side thereof is attached via a bonding material, wherein
in an orthogonal coordinate system composed of an X-axis as an electrical axis, a Y-axis as a mechanical axis, and a Z-axis as an optic axis that are crystal axes of quartz crystal, the quartz crystal substrate has a Z′-axis that is an axis obtained by inclining the Z-axis such that a +Z-side thereof rotates about the X-axis toward a −Y-direction of the Y-axis, a Y′-axis that is an axis obtained by inclining the Y-axis such that a +Y-side thereof rotates about the X-axis toward a +Z-direction of the Z-axis, a major surface that is a surface including the X-axis and the Z′-axis, and a thickness in a direction along the Y′-axis,
the resonator element includes an electrode pad located in one end of the second area of the resonator element,
in a plan view, the area where the bonding material is bonded overlaps with the electrode pad and also with a portion of the end of the second area which does not include the electrode pad,
the resonator satisfies the relation:
1.5×λ≦ Xp

where Xp is the maximum length of an area of the second area where the bonding material is bonded along the X-axis in a plan view and λ is the wavelength of a flexural vibration occurring in the quartz crystal substrate, and
the resonator satisfies the relation:
λ/2≦ Lx

where Lx is the minimum length along the X-axis between an edge of the area of the second area where the bonding material is bonded on the first area side and an edge of the first area on the bonding material side in the plan view.

2. The resonator according to claim 1 , satisfying the relation:
2×λ≦ Xp.

3. A resonator device comprising:
the resonator according to claim 2 ; and
an electronic element.

4. The resonator device according to claim 3 , wherein
the electronic element is a temperature-sensitive element.

5. An oscillator comprising:
the resonator according to claim 2 ; and
an oscillation circuit electrically connected with the resonator.

6. The resonator according to claim 1 , wherein
the first area and the second area form a one-stage mesa structure.

7. The resonator according to claim 1 , wherein
the first area and the second area form a one-stage mesa.

8. The resonator according to claim 1 , further comprising an excitation electrode disposed in the first area.

9. The resonator according to claim 1 , further comprising an excitation electrode disposed in the first area.

10. A resonator device comprising:
the resonator according to claim 1 ; and
an electronic element.

11. The resonator device according to claim 10 , wherein
the electronic element is a temperature-sensitive element.

12. An oscillator comprising:
the resonator according to claim 1 ; and
an oscillation circuit electrically connected with the resonator.

13. An electronic apparatus comprising the resonator according to claim 1 .

14. A moving object comprising the resonator according to claim 1 .

Assignees

• Seiko Epson Corp

Inventors

• Komine Kenji
• Yamashita Go
• Suzuki Takumi
• Ikegami Wataru

Classifications

• H03H9/0538

  Constructional combinations of supports or holders with electromechanical or other electronic elements · CPC title

• H03H9/0547

  consisting of a vertical arrangement (H03H9/0566 takes precedence) · CPC title

• H03H9/19 Primary

  consisting of quartz · CPC title

• H03H9/02023

  consisting of quartz · CPC title

• H03H9/0552

  the device and the other elements being mounted on opposite sides of a common substrate · CPC title