Substrate transfer device for substrate processing system

Patent metadata

Field	Value
Publication number	US-9230840-B2
Application number	US-201214351044-A
Country	US
Kind code	B2
Filing date	Oct 2, 2012
Priority date	Oct 12, 2011
Publication date	Jan 5, 2016
Grant date	Jan 5, 2016

Abstract

In one embodiment, a substrate transfer device is equipped with a chamber wall, a table, a linear motor transfer mechanism, an optical window, and a laser measuring instrument. The chamber wall defines a transfer space. The table is housed within the transfer space. It is possible for a substrate to be loaded on the table. The linear motor transfer mechanism moves the table within the transfer space, by a linear motor. The optical window is installed between the transfer space and the space to the outside of the transfer space. For example, the optical window is disposed so as to seal off an opening defined in the chamber wall. The laser measuring instrument irradiates a laser light through the optical window and towards the table, receives reflected light from the table, and measures the position of the table.

First claim

What is claimed is:

1. A substrate transfer device, comprising:
a chamber wall configured to define a transfer space;
a table accommodated within the transfer space;
a linear motor transfer mechanism configured to move the table within the transfer space;
an optical window installed between the transfer space and a space existing outside the transfer space;
a laser measuring instrument configured to measure a position of the table by irradiating laser light toward the table through the optical window and receiving reflected light coming from the table; and
a pipe configured to optically interconnect the optical window and the transfer space,
wherein the laser measuring instrument is configured to irradiate the laser light through the optical window and a bore of the pipe and to receive the reflected light through the bore of the pipe and the optical window, and
wherein the pipe includes an inner surface defining the bore, at least a portion of the inner surface having corrugations of 0.1 mm to 3 mm.

2. The device of claim 1 , wherein the transfer space is a depressurizable transfer space.

3. The device of claim 1 , wherein the pipe includes an inner surface defining the bore, the inner surface being a porous surface.

4. The device of claim 1 , wherein the bore of the pipe includes a portion having a first inner diameter and a portion having a second inner diameter smaller than the first inner diameter, which portions are arranged along a longitudinal direction of the pipe.

5. The device of claim 1 , wherein the bore is defined along a zigzag route, and one or more optical mirrors optically interconnecting one end portion of the bore and the other end portion of the bore are installed in the bore of the pipe.

6. The device of claim 1 , further comprising:
a gas supply path configured to supply an inert gas into the bore of the pipe.

Assignees

• Tokyo Electron Ltd

Inventors

• Hiroki Tsutomu

Classifications

• H10P72/3302

  Mechanical parts of transfer devices · CPC title

• H10P72/0606

  Position monitoring, e.g. misposition detection or presence detection · CPC title

• H10P72/0464 Primary

  characterised by the construction of the transfer chamber · CPC title

• H10P72/53

  using optical controlling means · CPC title

• H10P72/32 Primary

  between different workstations · CPC title