Adjustable cathodoluminescence detection system and microscope employing such a system

Patent metadata

Field	Value
Publication number	US-9228962-B2
Application number	US-201414540220-A
Country	US
Kind code	B2
Filing date	Nov 13, 2014
Priority date	May 27, 2010
Publication date	Jan 5, 2016
Grant date	Jan 5, 2016

Abstract

A cathodoluminescence detection system is provided, including
a source of charged particles arranged to illuminate a sample with a charged particle beam, and an optical path having at least two optical components capable of collecting and conveying light radiation coming from the illuminated sample to an analysis device; each optical component of the optical path is selected so that: the maximum output angle of the optical component is less than or equal to 120% of the maximum acceptance angle of the next optical component; and the diameter of the radiation coming from the optical component in the input plane of the next optical component is less than or equal to 120% of the useful input diameter of the next optical component.

First claim

The invention claimed is:

1. A cathodoluminescence detection system comprising:
a source of charged particles arranged to illuminate a sample with a charged particle beam, and
an optical path comprising at least two optical components capable of collecting and conveying light radiation coming from said illuminated sample to analysis means, a first optical component of said at least two optical components is a collection component to collect light emitted from the sample, and a second optical component of said at least two optical components is downstream from the collection component in the direction of the light emitted from the sample,
each optical component of said optical path is selected so that:
the maximum output angle of said optical component is less than or equal to 120% of the maximum acceptance angle of the next optical component; and
the diameter of the radiation coming from said optical component in the input plane of the next optical component is less than or equal to 120% of the useful input diameter of the next optical component.

2. The system according to claim 1 , wherein each optical component on the optical path is selected so that the maximum output angle of an optical component is less than or equal to the maximum acceptance angle of the next optical component.

3. The system according to claim 1 , wherein each optical component of the optical path is selected so that the diameter of the radiation coming from an optical component in the input plane of the next optical component is less than or equal to the useful input diameter of the next optical component.

4. The system according to claim 1 , wherein each optical component of the optical path is positioned so that the offset of one optical component relative to the centre of the previous optical component complies with the following relationship:
Ds i /2≦1.2 De i+1 /2−Δ i+1 for i= 1 . . . N− 1

where:
N is the total number of the optical components in the optical path
Δ i+1 is the offset of optical component i+1 relative to the centre of optical component i,
De i+1 is the useful input diameter of component i+1,
Ds i is the diameter of the radiation coming from component i measured at the input of component i+1.

5. The system according to claim 4 , wherein each optical component of the optical path is positioned so that the offset of one optical component relative to the center of the previous optical component verifies the following equation:
Ds i /2≦ De i+1 /2−Δ i+1 for i= 1 . . . N− 1.

6. The system according to claim 1 , wherein at least one of the optical components on the optical path is a spectrometer comprising a focusing component at its input, said spectrometer and the other optical components of the optical path being selected so that the width of the beam at the input of the spectrometer in the dispersive direction is less than or equal to the limit diameter at the input of the spectrometer below which the resolution of the spectrometer no longer depends on the diameter of the waist of the light radiation at the input of the spectrometer.

7. The system according to claim 6 , wherein the optical component before the spectrometer comprises an optical fiber the output of which is positioned or imaged at the input of the spectrometer, said optical fiber and the optical component before the optical fiber are selected so that:
the diameter of the beam coming from the previous optical component measured at the input of the optical fiber is less than or equal to 100% of the useful diameter of the optical fiber, and
the maximum input angle of the beam coming from the previous optical component is less than or equal to 100% of the limit angle of incidence of said optical fiber.

8. The system according to claim 6 , wherein the optical component before the spectrometer comprises a plurality of optical fibers constituting an optical fiber bundle:
the optical fibers of said bundle being aligned, on the side of said spectrometer, perpendicular to the dispersion axis in the input plane of said spectrometer, and
the sum of the diameters of all of the optical fibers is preferably less than or equal to the size of the detector of the spectrometer in the non-dispersive direction divided by the magnification of the spectrometer in the non-dispersive direction; and
each optical fiber constituting the optical fiber bundle is selected so that:
the diameter of the beam coming from the previous optical component at the input of the optical fiber is less than or equal 100% of the useful diameter of the optical fiber, and
the maximum input angle of the beam coming from the previous optical component at the input of the optical fiber is less than or equal to 100% of the limit angle of incidence of said optical fiber.

9. The system according to claim 1 , wherein the optical component before the spectrometer comprises a plurality of optical fibers constituting an optical fiber bundle:
the optical fiber bundle is compact and has a hexagonal input, and/or
the ratio between the total diameter of the optical fiber bundle and the diameter of an optical fiber is between 3 and 30.

10. The system according to claim 1 , wherein the collection component has a total thickness of between 1 and 8 mm.

11. The system according to claim 10 , wherein the collection component performing the collection of the light radiation has:
if it is a paraboloid, a parameter “p” of between 1 and 3 mm, or a parameter “p” of the order of 2 mm ±1.5 mm; or
focal length “f” of between 0.75 and 2.5 mm.

12. The system according to claim 1 , wherein the optical components of the optical path are capable of being positioned in two dimensions of space perpendicular to the optical axis, such that, when the optical path comprises a spectrometer, the accuracy of the movement in at least one of the two directions is greater than or equal to:
the size at the spectrometer input, i.e. the dimension of the pixel of the detector divided by the magnification of the spectrometer, divided by the total magnification produced on the optical path between the source and the spectrometer input, or
when the optical component before the spectrometer is an optical fiber or an optical fiber bundle, the diameter of the optical fiber, or of the largest optical fiber in the bundle, divided by the total magnification produced on the optical path up to the input of the optical fiber or optical fiber bundle.

13. The system according to the claim 12 , wherein the accuracy of the displacement of an optical component in at least one direction is greater than or equal to:
the size of the spectrometer input, i.e. the dimension of the pixel of the detector divided by the magnification of the spectrometer, divided by the magnification produced on the optical path between the source and the spectrometer input plane and by the maximum acceptance angle of the first optical component, or
when a last optical component is an optical fiber or an optical fiber bundle, the diameter of the optical fiber, or the diameter of the largest optical fiber in the bundle, divided by the magnification produced on the optical path between the source and the input plane of the optical fiber or optical fiber bundle and by the maximum acceptance angle of the first optical component.

14. A microscope comprising:
a source of emission of a charged particle beam, and
a cathodoluminescence detection system according to claim 1 .

15. The microscope according to claim 14 , further comprising at least one of:
one bright field detector;
one dark field detector
one Electron Energy Loss Spectroscopy (E

Assignees

• Centre Nat Rech Scient
• Univ Paris Sud 11
• Centre Nat Recherche

Inventors

• Kociak Mathieu
• Zagonel Luiz Fernando
• Tence Marcel
• Mazzucco Stefano

Classifications

• H01J2237/2602

  Details · CPC title

• H01J2237/2802

  Transmission microscopes · CPC title

• G01N23/2254 Primary

  Measuring cathodoluminescence · CPC title

• H01J2237/2448

  Secondary particle detectors · CPC title

• H01J2237/24485

  Energy spectrometers · CPC title