Cathodoluminescence-activated nanoscale imaging

Patent metadata

Field	Value
Publication number	US-10161890-B2
Application number	US-201615564542-A
Country	US
Kind code	B2
Filing date	Apr 8, 2016
Priority date	Apr 8, 2015
Publication date	Dec 25, 2018
Grant date	Dec 25, 2018

Abstract

Provided herein are non-invasive methods of nanoscale imaging of a sample using an illumination layer and an electron beam. For example, the electron may activate the illumination layer without activating the sample, and the illumination layer may emit cathodoluminescence to produce a nanoscale image of the sample.

First claim

What is claimed is:

1. A system for imaging a sample, comprising:
an illumination layer;
a sample,
wherein the sample is positioned below the illumination layer;

an electron beam source,
wherein the electron beam source is positioned above the illumination layer, and is configured to contact multiple locations of the illumination layer with an electron beam, and
wherein the illumination layer is configured to emit photons when excited by contact with the electron beam;

an optical detector,
wherein the optical detector is configured to receive at least a portion of the photons emitted by the illumination layer,
wherein the at least a portion of the photons emitted by the illumination layer and received by the optical detector are located above the illumination layer; and

a signal correlation device,
wherein the signal correlation device is connected to the optical detector and the electron beam source, and is configured to correlate the photons received by the optical detector with the multiple locations of the illumination layer contacted with the electron beam to produce an image of the sample.

2. The system of claim 1 , wherein the electron beam source is configured to contact multiple locations of the illumination layer with an electron beam without contacting the sample with the electron beam.

3. The system of claim 1 , wherein the illumination layer has an optical near-field of 10 nm or less, and wherein the sample is located within the optical near-field of the illumination layer.

4. The system of claim 1 , further comprising a parabolic mirror to direct the at least a portion of the photons emitted by the illumination layer to be received by the optical detector.

5. The system of claim 1 , wherein the illumination layer comprises YAlO 3 and Ce 3+ .

6. The system of claim 5 , wherein the illumination layer is between 5 nm and 20 nm thick.

7. The system of claim 1 wherein the sample comprises a biological molecule, a liquid, a soft material, or any combinations thereof.

8. The system of claim 1 , wherein the system is configured to image the sample over time, and produce a plurality of images of the sample sequentially over a period of time.

9. A method for imaging a sample, comprising:
(i) producing an electron beam from an electron beam source;
(ii) contacting multiple locations of an illumination layer with the electron beam,
wherein the electron beam source is located above the illumination layer,
wherein a sample is located below the illumination layer,
wherein the contacting of the illumination layer with the electron beam excites least a portion of the illumination layer without exciting the sample, and
wherein at least a portion of the excited illumination layer emits photons;

(iii) detecting at least a portion of the photons emitted by the excited illumination layer,
wherein the detected photons are located above the illumination layer; and

(iv) correlating at least a portion of the detected photons with the multiple locations of the illumination layer contacted with the electron beam to produce an image of the sample.

10. The method of claim 9 , wherein the illumination layer comprises YAlO 3 and Ce 3+ .

11. The method of claim 10 , wherein the illumination layer is between 5 nm and 20 nm thick.

12. The method of claim 9 , wherein the sample comprises a biological molecule, a liquid, a soft material, or any combinations thereof.

13. The method of claim 9 , wherein (ii) through (iv) are repeated to produce one or more additional images of the sample sequentially over a period of time.

14. An image produced by the method of claim 9 .

15. The image of claim 14 , wherein the image has a spatial resolution, and the spatial resolution is less than 50 nm.

16. An imaging chip, comprising:
an illumination layer,
wherein the illumination layer is configured to be contacted by an electron beam produced from an electron beam source positioned above the illumination layer, become excited by contact with the electron beam, and emit photons when excited;

a frame layer,
wherein the frame layer is configured to provide structural support, is positioned above the illumination layer, and has an imaging window through which an electron beam passes to contact the illumination layer without contacting the frame layer; and

a buffer layer,
wherein the buffer layer is positioned between the frame layer and the illumination layer.

17. The imaging chip of claim 16 , further comprising a sample layer, wherein the sample layer is configured to hold a sample and is positioned below the illumination layer.

18. The imaging chip of claim 17 , wherein the sample layer further comprises a sample.

19. The imaging chip of claim 16 , wherein the illumination layer comprises Ce 3+ and YAlO 3 .

20. The imaging chip of claim 19 , wherein the illumination layer is between 5 nm and 20 nm thick.

21. The imaging chip of claim 20 , wherein at least a portion of the illumination layer is not contacted by the frame layer.

22. The imaging chip of claim 16 , wherein the frame layer comprises Si.

23. The imaging chip of claim 16 , further comprising an additional buffer layer, wherein the additional buffer layer is positioned between the buffer layer and the frame layer, the buffer layer comprises LaAlO 3 , and the additional buffer layer comprises SrTiO 3 .

Assignees

• Univ California

Inventors

• Ginsberg Naomi
• Bischak Connor Gregory
• Hetherington Craig L
• Kaz David M

Classifications

• G01N23/22

  by measuring secondary emission from the material · CPC title

• G01N23/2254 Primary

  Measuring cathodoluminescence · CPC title

• G01N2223/612

  biological material · CPC title