Devices and methods for spectroscopic analysis

Patent metadata

Field	Value
Publication number	US-10436712-B2
Application number	US-201815909008-A
Country	US
Kind code	B2
Filing date	Mar 1, 2018
Priority date	May 16, 2013
Publication date	Oct 8, 2019
Grant date	Oct 8, 2019

Abstract

The present invention relates to devices and methods for spectrometric analysis of light-emitting samples. The device comprises a particle beam source, which generates a primary particle beam directed to the sample in such a way that the primary particle beam is incident on the sample and photons are released from the sample due to the interaction between primary particle beam and sample material. Moreover, the device comprises a plurality of light-pickup elements, which are suitable for capturing the photons released from the sample, wherein the light-pickup elements capture the photons emitted in the respectively assigned solid-angle range. Furthermore, the device comprises conduction elements, which are embodied to forward captured photons to an evaluation unit, and an analysis system, which comprises a plurality of evaluation units in such a way that photons captured by each light-pickup element are analyzed spectrally.

First claim

The invention claimed is:

1. A device, comprising:
an imaging grating configured to disperse photons released by a sample; and
a detector configured to detect the spectrum generated by the dispersion of the photons.

2. The device of claim 1 , wherein the detector comprises a detector selected from the group consisting of a line detector and a matrix detector.

3. The device of claim 1 , wherein the imaging grating comprises a hemispherical surface.

4. The device of claim 1 , wherein the imaging grating comprises a segment of a hemispherical surface.

5. The device of claim 1 , wherein the imaging grating comprises an aspherical imaging grating.

6. The device of claim 1 , wherein the imaging grating comprises a holographic imaging grating.

7. A device, comprising:
a particle beam source configured to generate a primary particle beam directable to a sample so that, when the primary particle beam is incident on the sample, photons are released from the sample due to the interaction between primary particle beam and the sample;
an imaging grating configured to disperse the photons released by the sample; and
a detector configured to detect the spectrum generated by the dispersion of the photons.

8. The device of claim 7 , wherein the detector comprises a detector selected from the group consisting of a line detector and a matrix detector.

9. The device of claim 7 , wherein the imaging grating comprises a hemispherical surface.

10. The device of claim 7 , wherein the imaging grating comprises a segment of a hemispherical surface.

11. The device of claim 7 , wherein the imaging grating comprises an opening configured to allow passage of the primary particle beam.

12. The device of claim 7 , wherein the imaging grating comprises an aspherical imaging grating.

13. The device of claim 7 , wherein the imaging grating comprises a holographic imaging grating.

14. The device of claim 7 , wherein the device is configured so that photons emitted from the sample at different solid angles are incident on the detector at different locations.

15. A method, comprising:
directing a primary particle beam to a sample so that the primary particle beam is incident on the sample and photons are released from the sample due to the interaction between the primary particle beam and the sample and so that released photons move along a multiplicity of possible trajectories, wherein each one of the possible trajectories is characterized by an elevation angle and an azimuth angle, and equivalent or similar trajectories are combined to solid-angle ranges of the trajectories;
capturing the released photons via an imaging grating that disperses the photons released by the sample; and
detecting the spectrum generated by the dispersion of the photons.

16. The method of claim 15 , further comprising evaluating the detected spectrum.

17. The method of claim 15 , wherein the photons are detected in an angularly resolved manner.

18. The method of claim 15 , wherein the imaging grating comprises a hemispherical surface.

19. The method of claim 15 , wherein the imaging grating comprises a segment of a hemispherical surface.

20. The method of claim 15 , wherein the imaging grating comprises an opening configured to allow passage of the primary particle beam.

Assignees

• Zeiss Carl Microscopy Gmbh

Inventors

• Correns Nico
• Rode Michael

Classifications

• G01N23/2254 Primary

  Measuring cathodoluminescence · CPC title

• G01N21/64 Primary

  Fluorescence; Phosphorescence · CPC title

• G01N2223/501

  array · CPC title

• G01J3/28

  Investigating the spectrum (using colour filters G01J3/51) · CPC title

• G01N2021/213

  Spectrometric ellipsometry · CPC title