Three dimensional semiconductor device having lateral channel
US-2015372057-A1 · Dec 24, 2015 · US
US9196829B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9196829-B2 |
| Application number | US-201313833139-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 15, 2013 |
| Priority date | Aug 31, 2010 |
| Publication date | Nov 24, 2015 |
| Grant date | Nov 24, 2015 |
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Defining an active region of a phase change memory (PCM) cell including depositing a first layer of material having a first chemical composition. A second layer of material having a second chemical composition is deposited on top of the first layer of material. An electrical current pulse is applied to locally heat a region of the first layer of material and the second layer of material to cause at least one of an inter-diffusion and a liquid mixing of the first layer of material and the second layer of material. This results in in the PCM cell containing a self-aligned region that includes a phase change material that is a mixture of the first chemical composition and the second chemical composition.
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What is claimed is: 1. A method of defining an active region of a phase change memory (PCM) cell comprising: depositing a first layer of material having a first chemical composition, the depositing on top of a first conductive electrode region that forms a bit line and on top of a second conductive electrode region that includes a u-trench; depositing a second layer of material having a second chemical composition on top of the first layer of material; depositing a resist laye…
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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