Electrostatic chuck

Patent metadata

Field	Value
Publication number	US-9184081-B2
Application number	US-201313869285-A
Country	US
Kind code	B2
Filing date	Apr 24, 2013
Priority date	Oct 25, 2010
Publication date	Nov 10, 2015
Grant date	Nov 10, 2015

Abstract

Each of electrostatic chucks 1 A to 1 F includes a susceptor 11 A having an adsorption face 11 a of adsorbing a semiconductor, and an electrostatic chuck electrode 4 embedded in the susceptor. The susceptor includes a plate shaped main body 3 and a surface corrosion resistant layer 2 including the adsorption face 2 . The surface corrosion resistant layer 2 is made of a ceramic material comprising magnesium, aluminum, oxygen and nitrogen as main components. The ceramic material comprises a main phase comprising MgO—AlN solid solution wherein aluminum nitride is dissolved into magnesium oxide.

First claim

The invention claimed is:

1. An electrostatic chuck comprising a susceptor and an electrostatic chuck electrode embedded within said susceptor, said susceptor comprising an adsorption face of adsorbing a semiconductor:
wherein said susceptor comprises a plate shaped main body and a surface corrosion resistant layer including said adsorption face;
wherein said surface corrosion resistant layer comprises a ceramic material comprising magnesium, aluminum, oxygen and nitrogen as main components; and
wherein said ceramic material comprises, as a main phase, a crystal phase comprising MgO—AlN solid solution wherein aluminum nitride is dissolved into magnesium oxide.

2. The electrostatic chuck of claim 1 , wherein a radio frequency voltage is applicable onto said electrostatic chuck electrode.

3. The electrostatic chuck of claim 1 , wherein said electrostatic chuck electrode is provided on a main face of said surface corrosion resistant layer on the side of said plate shaped main body.

4. The electrostatic chuck of claim 1 , further comprising a heating member embedded within said plate shaped main body.

5. The electrostatic chuck of claim 1 , wherein said MgO—AlN solid solution has XRD peaks of (200) and (220) faces taken by using CuKα ray in ranges of 2θ=42.9 to 44.8° and 62.3 to 65.2°, respectively, which are between peaks of cubic crystal of magnesium oxide and cubic crystal of aluminum nitride, respectively.

6. The electrostatic chuck of claim 5 , wherein said MgO—AlN solid solution has XRD peaks of (111), (200) and (220) faces taken by using CuKα ray in ranges of 2θ=36.9 to 39°, 2θ=42.9 to 44.8° and 2θ=62.3 to 65.2°, respectively, which are between peaks of cubic crystal of magnesium oxide and cubic crystal of aluminum nitride.

7. The electrostatic chuck of claim 5 , wherein said MgO—AlN solid solution has XRD peaks of (200) and (220) faces in ranges of 2θ=42.92° or higher and 2θ=62.33° or higher, respectively.

8. The electrostatic chuck of claim 5 , wherein said MgO—AlN solid solution has XRD peaks of (200) and (220) faces in ranges of 2θ=42.95° or higher and 2θ=62.35° or higher, respectively.

9. The electrostatic chuck of claim 5 , wherein said MgO—AlN solid solution has XRD peaks of (200) and (220) faces in ranges of 2θ=43.04° or higher and 2θ=62.50° or higher, respectively.

10. The electrostatic chuck of claim 5 , wherein said MgO—AlN solid solution has XRD peaks of (200) and (220) faces in ranges of 2θ=43.17° or higher and 2θ=62.72° or higher, respectively.

11. The electrostatic chuck of claim 1 , wherein said MgO—AlN solid solution has an integration width of said XRD peak of (200) face of 0.50° or lower.

12. The electrostatic chuck of claim 1 , wherein said ceramic material does not contain AlN crystal phase.

13. The electrostatic chuck of claim 1 , wherein said ceramic material comprises a magnesium-aluminum oxynitride phase exhibiting an XRD peak at least in 2θ=47 to 49° taken by using CuKα ray as a sub phase.

14. The electrostatic chuck of claim 13 , wherein A/B is 0.03 or higher, provided that A is assigned to a peak intensity of said XRD peak of 2θ=47 to 49° of said magnesium-aluminum oxynitride phase and that B is assigned to a peak intensity of a XRD peak of 2θ=62.3 to 65.2° of (220) face of said MgO—AlN solid solution.

15. The electrostatic chuck of claim 14 , wherein A/B is 0.14 or lower.

16. The electrostatic chuck of claim 1 , wherein (a+c+d)/(a+b+c+d) is 0.1 or smaller, provided that “a” is assigned to an area of an XRD peak of 2θ=47 to 49° of a magnesium-aluminum oxynitride phase, that “b” is assigned to an area of an XRD peak of 2θ=62.3 to 65.2° of (220) face of said MgO—AlN solid solution, that “c” is assigned to an area of an XRD peak of 2θ=around 45.0° of (400) face of spinel (MgAl 2 O 4 ), and that “d” is assigned to an area of an XRD peak of 2θ=around 36.0° of (002) face of aluminum nitride (AlN).

17. The electrostatic chuck of claim 1 , wherein said plate shaped main body comprises a ceramics comprising aluminum nitride, yttrium oxide or aluminum oxide as a main phase.

Assignees

• Ngk Insulators Ltd

Inventors

• Aikawa Kenichiro
• Watanabe Morimichi
• Jindo Asumi
• Katsuda Yuji
• Sato Yosuke
• Isoda Yoshinori

Classifications

• H10P72/722 Primary

  Details of electrostatic chucks · CPC title

• C04B2235/3217

  Aluminum oxide or oxide forming salts thereof, e.g. bauxite, alpha-alumina · CPC title

• C04B35/6261

  Milling · CPC title

• C04B2235/77

  Density · CPC title

• C04B2235/762

  Cubic symmetry, e.g. beta-SiC · CPC title