Apparatus for storing substrates

Patent metadata

Field	Value
Publication number	US-9184075-B2
Application number	US-201414185041-A
Country	US
Kind code	B2
Filing date	Feb 20, 2014
Priority date	Feb 20, 2013
Publication date	Nov 10, 2015
Grant date	Nov 10, 2015

Abstract

An apparatus for storing a substrate on which a pattern is formed includes a main body storing the substrate, a first pad located at the bottom of the main body and including a first groove supporting one edge of the substrate, a second pad neighboring the first pad and including a second groove supporting the center of the substrate, and a third pad spaced from the first pad, the second pad being disposed between the first and third pads, the third pad including a third groove supporting the other edge of the substrate.

First claim

What is claimed is:

1. An apparatus for storing a substrate, the apparatus comprising:
a main body storing the substrate;
a first pad located at a bottom of the main body, the first pad including a plurality of first grooves, the first grooves extending in an elongation direction;
a second pad located at the bottom of the main body, the second pad being spaced apart from and neighboring the first pad, the second pad including a plurality of second grooves, the second grooves extending in an elongation direction parallel to the elongation direction of the first grooves; and
a third pad located at the bottom of the main body, the third pad being spaced from the first pad, the second pad being disposed between the first pad and the third pad, the third pad including a plurality of third grooves, the third grooves extending in an elongation direction parallel to the elongation direction of the first grooves and the second grooves, wherein:
the first pad, the second pad, and the third pad are all on a same plane,
a virtual straight line centered in one of the grooves of the first pad and extending in a direction parallel to the elongation direction of the grooves of the first pad is centered in one of the grooves of the third pad and is not centered in any of the grooves of the second pad.

2. The apparatus of claim 1 , wherein each of the first, second and third grooves is formed by neighboring slope faces.

3. The apparatus of claim 1 , further comprising a storage cover covering the main body and including a supporting groove for supporting one edge of the substrate.

4. The apparatus of claim 3 , wherein the supporting groove has a rectangular form.

Assignees

• Samsung Display Co Ltd

Inventors

• Kim Ji-Eun
• So Dong-Yoon
• Kim Han-Soo

Classifications

• H10P72/1912

  characterised by shock absorbing elements, e.g. retainers or cushions · CPC title

• H10P72/15 Primary

  Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls · CPC title

• B65D85/48

  for glass sheets · CPC title

• H10P72/10 Primary

  using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] · CPC title

• H01L21/67369

  Electricity · mapped topic