High temperature biasable heater with advanced far edge electrode, electrostatic chuck, and embedded ground electrode
US-2024412957-A1 · Dec 12, 2024 · US
US9177840B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9177840-B2 |
| Application number | US-201213598977-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 30, 2012 |
| Priority date | Aug 30, 2011 |
| Publication date | Nov 3, 2015 |
| Grant date | Nov 3, 2015 |
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A thermal array system is provided. The thermal array system having each thermal element connected between a first power node and a second power node of the plurality of power nodes and each thermal element being connected in electrical series with an addressable switch configured to activate and deactivate the thermal element.
Opening claim text (preview).
We claim: 1. A thermal system comprising: a plurality of thermal elements; a control system having a plurality of power nodes, wherein each thermal element is connected between a first power node and a second power node of the plurality of power nodes, each thermal element being connected in electrical series with an addressable switch configured to activate and deactivate the thermal element, wherein each thermal element is independently controlled by the control system.…
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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