Silicon implantation in substrates and provision of silicon precursor compositions therefor
US-11062906-B2 · Jul 13, 2021 · US
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Kaim Robert patents
Kaim Robert is listed as an inventor on 20 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Kaim Robert |
| Total patents | 20 |
| First publication | Apr 21, 2015 |
| Latest publication | Jul 13, 2021 |
Notable patents
Publications ranked by popularity score, then publication date.
Carbon materials for carbon implantation
US-2020051819-A1 · Feb 13, 2020 · US
Carbon materials for carbon implantation
US-10497569-B2 · Dec 3, 2019 · US
Ion source cleaning in semiconductor processing systems
US-9991095-B2 · Jun 5, 2018 · US
Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system
US-2017330756-A1 · Nov 16, 2017 · US
Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system
US-9754786-B2 · Sep 5, 2017 · US
Isotopically-enriched boron-containing compounds, and methods of making and using same
US-9685304-B2 · Jun 20, 2017 · US
Carbon materials for carbon implantation
US-2017069499-A1 · Mar 9, 2017 · US
Boron ion implantation using alternative fluorinated boron precursors, and formation of large boron hydrides for implantation
US-9455147-B2 · Sep 27, 2016 · US
Silicon implantation in substrates and provision of silicon precursor compositions therefor
US-2016211137-A1 · Jul 21, 2016 · US
Recent patents
Latest publications not already listed above.
Enriched silicon precursor compositions and apparatus and processes for utilizing same
US-2016046849-A1 · Feb 18, 2016 · US
Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel
US-2016041136-A1 · Feb 11, 2016 · US
Isotopically-enriched boron-containing compounds, and methods of making and using same
US-2016013018-A1 · Jan 14, 2016 · US
Ion implantation system and method
US-2015357152-A1 · Dec 10, 2015 · US
Enriched silicon precursor compositions and apparatus and processes for utilizing same
US-9171725-B2 · Oct 27, 2015 · US
Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel
US-9170246-B2 · Oct 27, 2015 · US
Isotopically-enriched boron-containing compounds, and methods of making and using same
US-9142387-B2 · Sep 22, 2015 · US
Ion implantation system and method
US-9111860-B2 · Aug 18, 2015 · US
Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system
US-2015228486-A1 · Aug 13, 2015 · US
Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system
US-9012874-B2 · Apr 21, 2015 · US
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