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US-12183868-B2 · Dec 31, 2024 · US
Alignment mark design for semiconductor device
US9123729B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9123729-B2 |
| Application number | US-201414185746-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 20, 2014 |
| Priority date | Jun 12, 2012 |
| Publication date | Sep 1, 2015 |
| Grant date | Sep 1, 2015 |
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Abstract
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Better alignment mark designs for semiconductor devices may substantially lessen the frequency of layer misalignment scanner alignment problems. Exemplary alignment mark designs substantially avoid or minimize damage during the fill-in and etching and chemical mechanical processing processes. Thus, additional processing steps to even out various layers or to address the misalignment problems may also be avoided.
First claim
Opening claim text (preview).
What is claimed is: 1. An alignment mark region of a semiconductor device, the alignment mark region comprising: a plurality of columnar alignment marks, each columnar alignment mark having a columnar alignment mark width, wherein two adjacent columnar alignment marks are separated by a first distance, wherein two other adjacent columnar alignment marks are separated by a second distance greater than the first distance, wherein the columnar alignment mark width is less than…
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Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
- H10W46/00Primary
Electricity · mapped topic
Electricity · mapped topic
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- What does patent US9123729B2 cover?
- Better alignment mark designs for semiconductor devices may substantially lessen the frequency of layer misalignment scanner alignment problems. Exemplary alignment mark designs substantially avoid or minimize damage during the fill-in and etching and chemical mechanical processing processes. Thus, additional processing steps to even out various layers or to address the misalignment problems ma…
- Who is the assignee on this patent?
- Macronix Int Co Ltd
- What technology area does this patent fall under?
- Primary CPC classification H10W46/00. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Sep 01 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).