Solution processing apparatus, solution processing method, and non-transitory computer-readable recording medium

Patent metadata

Field	Value
Publication number	US-9109934-B2
Application number	US-201313864654-A
Country	US
Kind code	B2
Filing date	Apr 17, 2013
Priority date	Apr 26, 2012
Publication date	Aug 18, 2015
Grant date	Aug 18, 2015

Abstract

According to an embodiment of the present disclosure, an apparatus is configured to perform a solution process by supplying a processing solution from a processing solution supply source to the substrate held on a substrate holder via a flow path member and a nozzle at a flow rate equal to or less than 1 mL/sec. The apparatus includes a solution transfer unit configured to transfer the processing solution to the nozzle, and mounted to the flow path member, and an ultrasonic flowmeter mounted to the flow path member at a downstream side from the solution transfer unit. In this embodiment, a lower limit of a flow rate range which is measured by the ultrasonic flowmeter is equal to or less than 1 mL/sec.

First claim

What is claimed is:

1. An apparatus configured to perform a solution process by supplying a processing solution from a processing solution supply source to the substrate held on a substrate holder via a flow path member and a nozzle, the apparatus comprising:
a solution transfer unit configured to transfer the processing solution to the nozzle, and mounted to the flow path member;
an ultrasonic flowmeter mounted to the flow path member at a downstream side from the solution tran…

Assignees

• Tokyo Electron Ltd

Inventors

• Ando Ryoji
• Satoh Takami

Classifications

• B05C11/1013

  Operations & Transport · mapped topic

• G01F1/66 Primary

  Physics · mapped topic

• B05C11/1005

  Operations & Transport · mapped topic

• B05C5/0208

  Operations & Transport · mapped topic

• H10P76/204 Primary

  Electricity · mapped topic