Fabrication method of vertical type semiconductor memory apparatus
US-9196832-B2 · Nov 24, 2015 · US
Method for fabricating a semiconductor device
US9105575B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9105575-B2 |
| Application number | US-201313972793-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 21, 2013 |
| Priority date | Apr 10, 2013 |
| Publication date | Aug 11, 2015 |
| Grant date | Aug 11, 2015 |
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Abstract
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A method for fabricating a semiconductor device includes: forming first lines having a hydrophobic surface extending parallel to each other in a direction between first insulation layers having a hydrophilic surface; self-aligning hydrophilic particles over the first insulation layers to expose portions of the first lines at predetermined intervals; forming a plurality of variable resistance elements over the exposed portions of the first lines; and removing the particles.
First claim
Opening claim text (preview).
What is claimed is: 1. A method for fabricating a semiconductor device, the method comprising: forming first lines having a hydrophobic surface extending parallel to each other in a direction between first insulation layers having a hydrophilic surface; self-aligning first hydrophilic particles over the first insulation layers to expose portions the first lines at predetermined intervals; forming a first material layer over the exposed portions of the first lines; and removi…
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Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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- What does patent US9105575B2 cover?
- A method for fabricating a semiconductor device includes: forming first lines having a hydrophobic surface extending parallel to each other in a direction between first insulation layers having a hydrophilic surface; self-aligning hydrophilic particles over the first insulation layers to expose portions of the first lines at predetermined intervals; forming a plurality of variable resistance el…
- Who is the assignee on this patent?
- Sk Hynix Inc
- What technology area does this patent fall under?
- Primary CPC classification H01L27/2463. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Aug 11 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).