Semiconductor device with integrated magnetic element provided with a barrier structure against metal contamination, and manufacturing

US9105568B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-9105568-B2
Application numberUS-201314104934-A
CountryUS
Kind codeB2
Filing dateDec 12, 2013
Priority dateDec 14, 2012
Publication dateAug 11, 2015
Grant dateAug 11, 2015

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Abstract

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A semiconductor device including: a semiconductor body having a first side and a second side opposite to one another; a first barrier element, which extends over the first side of the semiconductor body and is made of a first material configured to act as barrier against metal ions, for example chosen from among titanium, tantalum, titanium alloys or compounds, tantalum alloy; a magnetic element, which extends over the first barrier layer and is made of a second material having magnetic properties, for example a ferromagnetic material; a second barrier element, which extends over the magnetic layer and is made of a third material configured to act as barrier against metal ions, for example chosen from among titanium, tantalum, titanium alloys or compounds, tantalum alloys or compounds. The first and second barrier elements form a top encapsulating structure and a bottom encapsulating structure for the magnetic element.

First claim

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What is claimed is: 1. A method for manufacturing a semiconductor device comprising the steps of: (a) providing a semiconductor body having a first side and a second side opposite the first side; (b) forming, on the first side of the semiconductor body, a first barrier element comprising a first material configured to act as barrier against metal ions; (c) forming, on the first barrier layer, a magnetic element comprising a second material having magnetic properties; (d) for…

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What does patent US9105568B2 cover?
A semiconductor device including: a semiconductor body having a first side and a second side opposite to one another; a first barrier element, which extends over the first side of the semiconductor body and is made of a first material configured to act as barrier against metal ions, for example chosen from among titanium, tantalum, titanium alloys or compounds, tantalum alloy; a magnetic elemen…
Who is the assignee on this patent?
St Microelectronics Srl
What technology area does this patent fall under?
Primary CPC classification H01L27/22. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Aug 11 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).