Vertical hall device comprising a slot in the hall effect region
US-9222991-B2 · Dec 29, 2015 · US
US9166145B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9166145-B2 |
| Application number | US-201414287559-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 27, 2014 |
| Priority date | May 24, 2013 |
| Publication date | Oct 20, 2015 |
| Grant date | Oct 20, 2015 |
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A magnetic field sensor device having a semiconductor body, whereby the semiconductor body has a top side and a bottom side, and whereby the semiconductor body has a substrate layer and a passivation layer formed above the substrate on the top side of the semiconductor body, and one or more integrated electronic components are formed in the substrate layer of the semiconductor body, and a Hall plate is provided on the top side of the semiconductor body above the passivation layer, and the Hall plate is formed of a graphene compound.
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What is claimed is: 1. A magnetic field sensor device comprising: a semiconductor body with a top side and a bottom side, the semiconductor body having a substrate layer and a passivation layer formed above the substrate layer on the top side of the semiconductor body; at least one electronic component formed in the substrate layer; and a Hall plate arranged on the top side of the semiconductor body above the passivation layer, wherein the Hall plate is formed of a graphene…
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