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Method and system of improved uniformity testing
US9105563B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9105563-B2 |
| Application number | US-201213713421-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 13, 2012 |
| Priority date | Nov 30, 2010 |
| Publication date | Aug 11, 2015 |
| Grant date | Aug 11, 2015 |
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Abstract
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A method and system includes a first substrate and a second substrate, each substrate comprising a predetermined baseline transmittance value at a predetermine wavelength of light, processing regions on the first substrate by combinatorially varying at least one of materials, process conditions, unit processes, and process sequences associated with the graphene production, performing a first characterization test on the processed regions on the first substrate to generate first results, processing regions on a second substrate in a combinatorial manner by varying at least one of materials, process conditions, unit processes, and process sequences associated with the graphene production based on the first results of the first characterization test, performing a second characterization test on the processed regions on the second substrate to generate second results, and determining whether at least one of the first substrate and the second substrate meet a predetermined quality threshold based on the second results.
First claim
Opening claim text (preview).
What is claimed is: 1. A method comprising: providing a substrate comprising multiple site-isolated regions on a non-transparent substrate, wherein each of the multiple site-isolated regions comprises a graphene material combinatorially varied from any other graphene material in a different one of the multiple site-isolated regions using at least one of varying materials, varying process conditions, varying unit processes, or varying process sequences associated with graphene pro…
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Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
- H10P74/23Primary
Electricity · mapped topic
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Frequently asked questions
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- What does patent US9105563B2 cover?
- A method and system includes a first substrate and a second substrate, each substrate comprising a predetermined baseline transmittance value at a predetermine wavelength of light, processing regions on the first substrate by combinatorially varying at least one of materials, process conditions, unit processes, and process sequences associated with the graphene production, performing a first ch…
- Who is the assignee on this patent?
- Intermolecular Inc
- What technology area does this patent fall under?
- Primary CPC classification H10P74/23. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Aug 11 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).