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Substrate treatment apparatus, substrate treatment method, and non-transitory storage medium
US9105519B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9105519-B2 |
| Application number | US-201414518244-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 20, 2014 |
| Priority date | Feb 7, 2012 |
| Publication date | Aug 11, 2015 |
| Grant date | Aug 11, 2015 |
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- Title
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Abstract
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A substrate treatment apparatus configured such that substrates in a same lot are distributed by a delivery mechanism into a plurality of unit blocks, each unit block including a solution treatment module, an ultraviolet irradiation module, and a substrate carrying mechanism, the apparatus includes: an illuminance detection part that detects an illuminance of a light source of the ultraviolet irradiation module; and a control part that controls, when an illuminance detection value of the ultraviolet irradiation module in one unit block among the plurality of unit blocks becomes a set value or less, the delivery mechanism to stop delivery of a substrate to the one unit block and deliver subsequent substrates to another unit block, and the ultraviolet irradiation module to perform irradiation on substrates which have already been delivered to the one unit block with an irradiation time adjusted to a length according to the illuminance detection value.
First claim
Opening claim text (preview).
What is claimed is: 1. A substrate treatment method using a substrate treatment apparatus configured such that substrates in a same lot taken out of a carrier are distributed by a delivery mechanism into a plurality of unit blocks for performing a same series of treatments, each unit block comprising a solution treatment module for supplying a treatment solution to a substrate, an ultraviolet irradiation module for irradiating a substrate with an ultraviolet ray, and a substrate ca…
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Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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Frequently asked questions
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- What does patent US9105519B2 cover?
- A substrate treatment apparatus configured such that substrates in a same lot are distributed by a delivery mechanism into a plurality of unit blocks, each unit block including a solution treatment module, an ultraviolet irradiation module, and a substrate carrying mechanism, the apparatus includes: an illuminance detection part that detects an illuminance of a light source of the ultraviolet i…
- Who is the assignee on this patent?
- Tokyo Electron Ltd
- What technology area does this patent fall under?
- Primary CPC classification H10P72/0436. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Aug 11 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).