Lithographic apparatus and a method of operating the apparatus
US-12072635-B2 · Aug 27, 2024 · US
Lithographic apparatus and device manufacturing method
US9099501B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9099501-B2 |
| Application number | US-90193910-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 11, 2010 |
| Priority date | Jun 28, 2005 |
| Publication date | Aug 4, 2015 |
| Grant date | Aug 4, 2015 |
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Abstract
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A gas knife configured to dry a surface in an immersion lithographic apparatus is optimized to remove liquid by ensuring that a pressure gradient is built up in the liquid film on the surface being dried.
First claim
Opening claim text (preview).
The invention claimed is: 1. A lithographic projection apparatus, comprising: a projection system arranged to project a pattern from a patterning device onto a substrate through a liquid; a gas knife configured to provide gas to a surface to be dried; and an extractor positioned adjacent the gas knife to remove gas, liquid, or both, wherein an outlet of the gas knife and an inlet of the extractor are formed in a substantially flat surface, the distance between the inlet of t…
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Electricity · mapped topic
Physics · mapped topic
- G03F7/70341Primary
Physics · mapped topic
- G03F7/70866Primary
Physics · mapped topic
- H01L21/67034Primary
Electricity · mapped topic
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Frequently asked questions
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- What does patent US9099501B2 cover?
- A gas knife configured to dry a surface in an immersion lithographic apparatus is optimized to remove liquid by ensuring that a pressure gradient is built up in the liquid film on the surface being dried.
- Who is the assignee on this patent?
- Kemper Nicolaas Rudolf, Donders Sjoerd Nicolaas Lambertus, Hoogendam Christiaan Alexander, and 3 more
- What technology area does this patent fall under?
- Primary CPC classification G03F7/70341. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Aug 04 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).