MR enhancing layer (MREL) for spintronic devices

Patent metadata

Field	Value
Publication number	US-9034662-B2
Application number	US-201414244923-A
Country	US
Kind code	B2
Filing date	Apr 4, 2014
Priority date	Apr 26, 2010
Publication date	May 19, 2015
Grant date	May 19, 2015

Abstract

The performance of an MR device has been improved by inserting one or more Magneto-Resistance Enhancing Layers (MRELs) into approximately the center of one or more of the magnetic layers such as an inner pinned (AP1) layer, spin injection layer (SIL), field generation layer (FGL), and a free layer. An MREL is a layer of a low band gap, high electron mobility semiconductor such as ZnO or a semimetal such as Bi. The MREL may further comprise a first conductive layer that contacts a bottom surface of the semiconductor or semimetal layer, and a second conductive layer that contacts a top surface of the semiconductor or semimetal layer.

First claim

What is claimed is:

1. A process to manufacture a magnetic read head, comprising:
providing a seed layer and depositing thereon an antiferromagnetic (AFM) layer;
depositing an AP2 pinned layer on said AFM layer;
depositing an AFM coupling layer on said AP2 pinned layer;
forming a ferromagnetic AP1 layer on said AFM coupling layer;
depositing a spacer layer;
forming a free layer on said spacer layer; and
depositing a capping layer on the free layer wherein at least one of the ferromagnetic AP1 layer and the free layer further comprise a magneto-resistance enhancing layer (MREL) comprising an n-type semiconductor (S) layer selected from a group consisting of semiconductors and semimetals, and two conductive layers M1, M2 to give a FM1/M1/S/M2/FM2/spacer/free layer, AP1/spacer/FL1/M1/S/M2/FL2, or FM1/M1/S/M2/FM2/spacer/FL1/M1/S/M2/FL2 configuration where FM1 and FM2 are first and second portions of the AP1 layer that contact bottom and top surfaces, respectively, of a first MREL, and FL1 and FL2 are first and second portions of the free layer that contact bottom and top surfaces, respectively, of a second MREL, and wherein M1 and M2 are selected from a group consisting of Cu, Ag, Au, C (including graphene and nano-tubes), Zn, Ti, Sn, Cr, Al, Mg, and Ru.

2. The process of claim 1 wherein the spacer layer is electrically conductive whereby the magnetic read head is a Giant Magneto-Resistance (GMR) device.

3. The process of claim 1 wherein the spacer layer is electrically insulating whereby the magnetic read head is a Tunneling Magneto-Resistance (TMR) device.

4. The process of claim 1 wherein the semiconductors have band gaps in a range of about 1 to 6 eV and electron mobilities in a range of about 50 to 50,000 cm 2 ·sec −1 ·V −1 .

5. The process of claim 1 wherein the semiconductors are selected from a group consisting of ZnO, ZnS, Zn x Mg (1-x) O, ZnCuO, ZnCdO, ZnAlO, ZnSe, ZnTe, Si, Ge, TiO 2 , AlN, GaN, InN, AlP, AlAs, AlSb, GaP, GaAs, GaSb, InP, InAs, ZnS, CdS, CdTe, HgTe, PbS, PbSe, PbTe, SnO, SnTe, Cu 2 O, FeSi 2 , CrMnSi, Mg 2 Si, RuSi 3 , and Ir 3 Si 5 .

6. The process of claim 5 wherein said semiconductors are undoped or their conductivity is adjusted by inclusion of a dopant selected from a group consisting of Si, B, Mg, Mn, Al, Cu, Cd, Cr, Zn, Ti, Sn, Zr, Hf, Ru, Mo, Nb, Co, Fe, and Ni.

7. The process of claim 1 wherein the semimetals are selected from a group consisting of Sb, Bi, CoSi, Co x Fe (1-x) Si, Co x Ni (1-x) Si, Co x Mn (1-x) Si, FeSi, and Co x Cr (1-x) Si.

8. The process of claim 1 wherein the n-type semiconductor layer has a thickness from about 1 to 50 Angstroms.

9. The process of claim 1 wherein the n-type semiconductor layer has a band gap from about 0.3 to 8 eV.

10. A process to manufacture a spintronic device, comprising:
providing a seed layer and forming thereon a ferromagnetic (FM) layer;
depositing a spacer layer on the ferromagnetic layer;
forming a free layer on said spacer layer;
depositing a capping layer on the free layer wherein a least one of the ferromagnetic layer and the free layer further comprise a magneto-resistance enhancing layer (MREL) comprising an n-type semiconductor (S) layer selected from a group consisting of semiconductors and semimetals, and two conductive layers M1, M2 to give a FM1/M1/S/M2/FM2/spacer/free layer, AP1/spacer/FL1/M1/S/M2/FL2, or FM1/M1/S/M2/FM2/spacer/FL1/M1/S/M2/FL2 configuration where FM1 and FM2 are first and second portions of the FM layer that contact bottom and top surfaces, respectively, of a first MREL, and FL1 and FL2 are first and second portions of the free layer that contact bottom and top surfaces, respectively, of a second MREL, and wherein M1 and M2 are selected from a group consisting of Cu, Ag, Au, C (including graphene and nano-tubes), Zn, Ti, Sn, Cr, Al, Mg, and Ru; and
applying a magnetic field normal to the plane of the FM layer to magnetize the FM layer in a direction that is normal to a bottom surface and top surface of the FM layer.

11. The process of claim 10 wherein the semiconductors have band gaps in a range of about 1 to 6 eV and electron mobilities in a range of about 50 to 50,000 cm 2 ·sec −1 ·V −1 .

12. The process of claim 10 wherein the semiconductors are selected from a group consisting of ZnO, ZnS, Zn x Mg (1-x) O, ZnCuO, ZnCdO, ZnAlO, ZnSe, ZnTe, Si, Ge, TiO 2 , AlN, GaN, InN, AlP, AlAs, AlSb, GaP, GaAs, GaSb, InP, InAs, ZnS, CdS, CdTe, HgTe, PbS, PbSe, PbTe, SnO, SnTe, Cu 2 O, FeSi 2 , CrMnSi, Mg 2 Si, RuSi 3 , and Ir 3 Si 5 .

13. The process of claim 12 wherein the semiconductors are undoped or their conductivity is adjusted by inclusion of a dopant selected from a group consisting of Si, B, Mg, Mn, Al, Cu, Cd, Cr, Ti, Zr, Hf, Ru, Mo, Nb, Co, Fe, and Ni.

14. The process of claim 10 wherein said semimetals are selected from the group consisting of Sb, Bi, CoSi, Co x Fe (1-x) Si, Co x Ni (1-x) Si, Co x Mn (1-x) Si, FeSi, and Co x Cr (1-x) Si.

15. The process of claim 10 wherein the n-type semiconductor layer has a thickness from about 1 to 50 Angstroms.

16. The process of claim 10 wherein the n-type semiconductor layer has a band gap from about 0.3 to 8 eV.

Assignees

• Headway Technologies Inc

Inventors

• Zhang Kunliang
• Li Min
• Zhou Yuchen

Classifications

• H01F10/193

  Magnetic semiconductor compounds {(in general H01F1/40; multilayers, e.g. superlattices H01F10/3213)} · CPC title

• H01F41/303

  with exchange coupling adjustment of magnetic film pairs, e.g. interface modifications by reduction, oxidation · CPC title

• B82Y40/00

  Manufacture or treatment of nanostructures · CPC title

• B82Y25/00

  Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance · CPC title

• H01F10/3295

  Spin-exchange coupled multilayers wherein the magnetic pinned or free layers are laminated without anti-parallel coupling within the pinned and free layers · CPC title