Substrate Mapping Apparatus And Method Therefor
US-2024290642-A1 · Aug 29, 2024 · US
Inspection device, inspection method and non-transitory storage medium for inspecting deformation of substrate holding member, and substrate processing system including the inspection device
US9030656B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9030656-B2 |
| Application number | US-201113278496-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 21, 2011 |
| Priority date | Oct 22, 2010 |
| Publication date | May 12, 2015 |
| Grant date | May 12, 2015 |
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Abstract
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Disclosed is an inspection device for inspecting deformation of a substrate holding member of a substrate transport apparatus. The substrate holding member is moved in the forward-and-backward direction relative to the transport base to pass across a light path of the detection light formed by an optical detection unit. The position, with respect to a direction transverse to the forward-and-backward direction, of the substrate holding member is detected based on a detection signal of the optical detection unit. Based on a correlation data expressing the relationship between a first parameter indicative of a change of a position of the substrate holding member with respect to the forward-and-backward direction and a second parameter indicative of the change of the position of the substrate holding member with respect to the direction transverse to the forward-and-backward direction, whether or not deformation occurs in the substrate holding member is judged.
First claim
Opening claim text (preview).
The invention claimed is: 1. An inspection device for inspecting deformation of a substrate holder of a substrate transport apparatus, the substrate transport apparatus having a transport base and a drive unit for horizontally moving the substrate holder in a forward-and-backward direction relative to the transport base, said inspection device comprising: an optical detection unit having a light emitter and a light receiver, the optical detection unit being configured to emit by t…
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Classifications
Electricity · mapped topic
- H10P72/0608Primary
Electricity · mapped topic
Cross-Sectional Technologies · mapped topic
Electricity · mapped topic
- H01L21/67265Primary
Electricity · mapped topic
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Frequently asked questions
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- What does patent US9030656B2 cover?
- Disclosed is an inspection device for inspecting deformation of a substrate holding member of a substrate transport apparatus. The substrate holding member is moved in the forward-and-backward direction relative to the transport base to pass across a light path of the detection light formed by an optical detection unit. The position, with respect to a direction transverse to the forward-and-bac…
- Who is the assignee on this patent?
- Kajiwara Hideki, Maki Junnosuke, Enokida Suguru, and 1 more
- What technology area does this patent fall under?
- Primary CPC classification H10P72/0608. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue May 12 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).