Probe card and test apparatus
US-2016291055-A1 · Oct 6, 2016 · US
Method for thermal stabilization of probe card and inspection apparatus
US9030218B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9030218-B2 |
| Application number | US-201113978411-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 9, 2011 |
| Priority date | Jan 13, 2011 |
| Publication date | May 12, 2015 |
| Grant date | May 12, 2015 |
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- Title
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Abstract
Official abstract text for this publication.
In a method for thermal stabilization of a probe card, a probe card is adjusted to a prescribed temperature in a short time by making a heat source directly contact the probe card and is accurately determined whether the probe card is thermally stable. A heat transfer substrate is mounted on a mounting table. The temperature of the heat transfer substrate is adjusted through the mounting table. The mounting table is raised, and a plurality of probes is brought into contact with the heat transfer substrate at a prescribed target load. The contact load between the heat transfer substrate and the probes, which changes according to the thermal changes in the probe card, is detected. The mounting table is controlled vertically through a vertical drive mechanism such that the contact load becomes the target load until the probe card is thermally stable.
First claim
Opening claim text (preview).
What is claimed is: 1. A method for thermal stabilization of a probe card by using an inspection apparatus including: a horizontally and vertically movable mounting table; a probe card having a plurality of probes, disposed above the mounting table; a vertical drive mechanism configured to vertically move the mounting table; a temperature control unit configured to control a temperature of the mounting table; and a control unit configured to control the vertical drive mechanism and…
Assignees
Inventors
Classifications
Physics · mapped topic
- G01R31/2863Primary
Physics · mapped topic
- G01R1/07342Primary
Physics · mapped topic
- H10P74/203Primary
Electricity · mapped topic
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Frequently asked questions
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- What does patent US9030218B2 cover?
- In a method for thermal stabilization of a probe card, a probe card is adjusted to a prescribed temperature in a short time by making a heat source directly contact the probe card and is accurately determined whether the probe card is thermally stable. A heat transfer substrate is mounted on a mounting table. The temperature of the heat transfer substrate is adjusted through the mounting table.…
- Who is the assignee on this patent?
- Ishii Kazunari, Watanabe Tetsuji, Koizumi Shinya, and 2 more
- What technology area does this patent fall under?
- Primary CPC classification G01R31/2863. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue May 12 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).