Lithographic apparatus and a method of operating the apparatus
US-12072635-B2 · Aug 27, 2024 · US
Substrate table, a lithographic apparatus and a device manufacturing method
US9013683B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9013683-B2 |
| Application number | US-201113329971-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 19, 2011 |
| Priority date | Dec 21, 2010 |
| Publication date | Apr 21, 2015 |
| Grant date | Apr 21, 2015 |
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Abstract
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A table for a lithographic apparatus, the table having a catchment opening formed in an upper surface of the table, the catchment opening in fluid communication through the table with the environment of the table at a drain opening in a surface of the table other than the upper surface.
First claim
Opening claim text (preview).
The invention claimed is: 1. A table for a lithographic apparatus, the table comprising: a catchment opening formed in an upper surface of the table, the catchment opening in fluid communication through the table with the environment of the table at a drain opening in a surface of the table other than the upper surface; a porous structure in a flow path between the catchment opening and the drain opening, wherein at least part of the flow path is wider than the catchment opening…
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Classifications
- G03F7/70341Primary
Physics · mapped topic
- G03F7/70716Primary
Physics · mapped topic
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Frequently asked questions
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- What does patent US9013683B2 cover?
- A table for a lithographic apparatus, the table having a catchment opening formed in an upper surface of the table, the catchment opening in fluid communication through the table with the environment of the table at a drain opening in a surface of the table other than the upper surface.
- Who is the assignee on this patent?
- Ten Kate Nicolaas, Lafarre Raymond Wilhelmus Louis, Asml Netherlands Bv
- What technology area does this patent fall under?
- Primary CPC classification G03F7/70341. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Apr 21 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).