Lithographic apparatus and a method of operating the apparatus
US-12072635-B2 · Aug 27, 2024 · US
Mask
US8999613B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8999613-B2 |
| Application number | US-201313959427-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 5, 2013 |
| Priority date | Dec 1, 2011 |
| Publication date | Apr 7, 2015 |
| Grant date | Apr 7, 2015 |
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- Title
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Abstract
Official abstract text for this publication.
Provided are a mask, a method of manufacturing the same, a light irradiation device, a method of radiating light, and a method of manufacturing an orientationally ordered photo-alignment layer. By the mask, collimated light or nearly collimated light may be irradiated with uniform illumination to a surface of an object to be irradiated. Further, by the mask, light may be effectively incident even on the object to be irradiated in the curved shape.
First claim
Opening claim text (preview).
The invention claimed is: 1. A device, comprising: an apparatus configured to position an object to be irradiated opposite a mask, the mask comprising: a transparent supporting structure having a surface with a curved shape; and a metal layer having at least one opening to guide light to the object, and having a surface with the curved shape of the transparent supporting structure, and wherein a width of the at least one opening is 5 or more times a distance between the mask…
Assignees
Inventors
Classifications
- G03F7/70733Primary
Physics · mapped topic
Physics · mapped topic
Physics · mapped topic
- G03F1/50Primary
Physics · mapped topic
Physics · mapped topic
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Frequently asked questions
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- What does patent US8999613B2 cover?
- Provided are a mask, a method of manufacturing the same, a light irradiation device, a method of radiating light, and a method of manufacturing an orientationally ordered photo-alignment layer. By the mask, collimated light or nearly collimated light may be irradiated with uniform illumination to a surface of an object to be irradiated. Further, by the mask, light may be effectively incident ev…
- Who is the assignee on this patent?
- Lg Chemical Ltd, Lg Chemical Ltd
- What technology area does this patent fall under?
- Primary CPC classification G03F7/70733. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Apr 07 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).