Method of manufacturing a structure comprising a graphene sheet provided with metal pins, structure thus obtained and use thereof

Patent metadata

Field	Value
Publication number	US-8999440-B2
Application number	US-201113187385-A
Country	US
Kind code	B2
Filing date	Jul 20, 2011
Priority date	Jul 21, 2010
Publication date	Apr 7, 2015
Grant date	Apr 7, 2015

Abstract

A structure, method of manufacturing a structure, and methods of using a structure including a graphene sheet is disclosed. According to one aspect, the grapheme sheet is provided, on one of the faces of the structure, with a plurality of metal pins. The metal pins being separated from one another by a dielectric medium chosen from air and dielectric materials. The method including the steps of synthesizing, by vapor phase catalytic growth, the graphene sheet on a plurality of metal pins that are disposed on a membrane made from dielectric material or integrated in the membrane. The growth being catalyzed by the metal pins. According to some aspects, the membrane is removed from the structure. The structure may be used, for example, in the fields of micro- and nanoelectronics, micro- and nanoelectronic engineering, spintronics, photovoltaics, light emitting diode display, or the like.

First claim

The invention claimed is:

1. A method of manufacturing a structure comprising a graphene sheet having a first face and a second face, the first face being provided with a plurality of metal pins, the metal pins being separated from one another by a dielectric medium selected from air and dielectric materials, said method comprising:
synthesizing, by vapor phase catalytic growth, the graphene sheet on a plurality of metal pins, the metal pins being disposed on a membrane made from a dielectric material or integrated in the membrane, wherein the catalytic growth is catalysed by the metal pins, wherein the metal pins are formed of a metal or a mixture of metals, the metal(s) having a lattice parameter within about 2% of a lattice parameter of the graphene.

2. The method of claim 1 , wherein the vapor phase catalytic growth comprises chemical vapor deposition.

3. The method of claim 2 , wherein the chemical vapor deposition is carried out with a gaseous flow comprising at least one hydrocarbon at a temperature ranging from about 200° C. to about 2000° C. and at a pressure ranging from ultrahigh vacuum pressure to atmospheric pressure.

4. The method of claim 2 , in which the chemical vapor deposition is carried out with a gaseous flow comprising at least one C1 to C3 hydrocarbon at a temperature ranging from about 800° C. to about 1200° C. and at a pressure less than atmospheric pressure and greater than 10 −6 Pa.

5. The method of claim 1 , wherein the metal pins are formed of a metal or a mixture of metals selected from the group consisting of nickel, copper, cobalt, ruthenium, palladium, iridium and platinum.

6. The method of claim 5 , wherein the metal pins are formed of nickel.

7. The method of claim 1 , wherein the metal pins form a lattice.

8. The method of claim 7 , wherein the lattice has a regular pitch.

9. The method of claim 7 , wherein a length of the metal pins measured in a direction parallel to a plane of the membrane made from the dielectric material is greater than 1 nm and less than 1 μm.

10. The method of claim 7 , wherein two adjacent metal pins are separated from one another by a distance equal to a distance that is greater than 1 nm and less than 1 μm.

11. The method of claim 1 , further comprising producing the metal pins, wherein producing the metal pins comprises filling openings in a support with a metal or metal alloy.

12. The method of claim 11 , wherein the openings in the support form a lattice.

13. The method of claim 12 , wherein the lattice has a regular pitch.

14. The method of claim 11 , wherein a length of the openings in the support measured in a direction parallel to a plane of the support is greater than 1 nm and less than 1 μm.

15. The method of claim 11 , wherein two adjacent openings in the support are separated the one from another by a distance equal to a distance that is greater than 1 nm and less than 1 μm.

16. The method of claim 11 , wherein the support is formed by the membrane made from the dielectric material, and wherein the openings in the support correspond to pores that comprise the membrane before filling of said openings by the metal or metal alloy, the pores forming a lattice and having a length measured in a direction parallel to a plane of said membrane which is equal to a length that is greater than 1 nm and less than 1 μm.

17. The method according to claim 16 , wherein the membrane is formed of a material selected from the group consisting of alumina, silica, a material having a formula Si v O w C y H z or Si v O w C x N y H z in which v, w, x, y and z are nonzero coefficients, a polymer and a sequenced copolymer.

18. The method according to claim 1 , further comprising removing the membrane.

Assignees

• Zenasni Aziz
• Coraux Johann
• Ivanova-Hristova Valentina
• Landis Stefan
• Pernel Carole
• Centre Nat Rech Scient
• Commissariat L Energie Atomique Et Aux Energies Alternatives

Inventors

• Zenasni Aziz
• Coraux Johann
• Ivanova-Hristova Valentina
• Landis Stefan
• Pernel Carole

Classifications

• H01B1/04

  mainly consisting of carbon-silicon compounds, carbon or silicon · CPC title

• H01M4/139

  Processes of manufacture · CPC title

• H01M4/583

  Carbonaceous material, e.g. graphite-intercalation compounds or CFx · CPC title

• Y10T428/24752

  Laterally noncoextensive components · CPC title

• Y10T29/49815

  Disassembling · CPC title