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Substrate inverting device, substrate inverting method, and peeling system
US8997822B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8997822-B2 |
| Application number | US-201213979549-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 12, 2012 |
| Priority date | Jan 19, 2011 |
| Publication date | Apr 7, 2015 |
| Grant date | Apr 7, 2015 |
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- Title
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- Abstract
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Abstract
Official abstract text for this publication.
According to an embodiment of the present disclosure, a substrate inverting device for inverting front and rear surfaces of a substrate is provided. The substrate includes a first holding unit configured to hold one surface of the substrate and a second holding unit disposed to face the first holding unit and configured to hold one surface of the substrate. Further, the substrate includes a moving mechanism configured to relatively move at least one of the first holding unit and the second holding unit to approach each other and stay spaced apart from each other, and a transfer mechanism configured to hold the one surface of the substrate. In this case, a support of the substrate in the first holding unit, the second holding unit and the transfer mechanism is performed by a Bernoulli chuck.
First claim
Opening claim text (preview).
What is claimed is: 1. A substrate inverting device for inverting front and rear surfaces of a substrate, comprising: a first holding unit having a first Bernoulli chuck configured to hold a first surface of the substrate; a second holding unit disposed to face the first holding unit, and having a second Bernoulli chuck configured to hold a second surface of the substrate; a moving mechanism configured to relatively move at least one of the first holding unit and the second ho…
Assignees
Inventors
Classifications
Electricity · mapped topic
- H10P72/3306Primary
Electricity · mapped topic
Electricity · mapped topic
- H10P72/0428Primary
Electricity · mapped topic
Electricity · mapped topic
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Frequently asked questions
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- What does patent US8997822B2 cover?
- According to an embodiment of the present disclosure, a substrate inverting device for inverting front and rear surfaces of a substrate is provided. The substrate includes a first holding unit configured to hold one surface of the substrate and a second holding unit disposed to face the first holding unit and configured to hold one surface of the substrate. Further, the substrate includes a mov…
- Who is the assignee on this patent?
- Iwashita Yasuharu, Hirakawa Osamu, Honda Masaru, and 2 more
- What technology area does this patent fall under?
- Primary CPC classification H10P72/3306. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Apr 07 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).