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Sequencer for combining automated and manual-assistance jobs in a charged particle beam device
US8995745B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8995745-B2 |
| Application number | US-201213562785-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 31, 2012 |
| Priority date | Jul 31, 2012 |
| Publication date | Mar 31, 2015 |
| Grant date | Mar 31, 2015 |
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Abstract
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A device for imaging and processing a workpiece having nanometric features through the use of at least one charged particle beam, by both fully automated procedures and manual assistance procedures. The device includes a user interface, including a schedule input entry device and a human operator ready input that can be placed in a first state or a second state and a procedure scheduler, accepting a schedule of procedures, including fully automated procedures and manual assistance procedures, from the schedule input entry device. Additionally, a procedure sequencer that, when the human operator ready input is in the second state, sequences through fully automated procedures until the human operator ready input is placed into the first state, at which time the sequencer begins sequencing the manual assistance procedures, after reaching a safe termination point for the fully automated procedures being performed.
First claim
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We claim as follows: 1. A device for imaging and processing a workpiece having nanometric features through the use of at least one charged particle beam, by both fully automated procedures and manual assistance procedures, comprising: a. a charged particle beam system for processing a work piece; b. a user interface, including a schedule input entry device and a human operator ready input that indicates whether or not a human operator is available to perform an operation using t…
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Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
- H01J37/265Primary
Electricity · mapped topic
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- What does patent US8995745B2 cover?
- A device for imaging and processing a workpiece having nanometric features through the use of at least one charged particle beam, by both fully automated procedures and manual assistance procedures. The device includes a user interface, including a schedule input entry device and a human operator ready input that can be placed in a first state or a second state and a procedure scheduler, accept…
- Who is the assignee on this patent?
- Young Richard J, Tanner Ryan, Warschauer Reinier Louis, and 1 more
- What technology area does this patent fall under?
- Primary CPC classification H01J37/265. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Mar 31 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).