Rapid Thermal Processing System With Cooling System
US-2024379390-A1 · Nov 14, 2024 · US
Temperature measurement apparatus, method of estimating temperature profile, recording medium and heat treatment apparatus
US8992079B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8992079-B2 |
| Application number | US-201213478304-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 23, 2012 |
| Priority date | May 26, 2011 |
| Publication date | Mar 31, 2015 |
| Grant date | Mar 31, 2015 |
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Abstract
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A temperature measurement apparatus for estimating a temperature profile in a process container, includes a radiation temperature measurement unit configured to measure the temperature of plural temperature measurement areas at a surface of the rotating table in a radius direction of the rotating table by scanning the surface of the rotating table in the radius direction; an operation control unit that controls to start heating of the process container by a heater while keeping the rotating table immobilized, and controls to repeat a scanning operation, in which the radiation temperature measurement unit scans the surface of the rotating table in the radius direction to obtain the temperature of the plural temperature measurement areas while the rotating table is rotated in a circumferential direction of the rotating table, after a predetermined period has passed from starting the heating of the process container.
First claim
Opening claim text (preview).
What is claimed is: 1. A temperature measurement apparatus for estimating a temperature profile in a process container of a heat treatment apparatus including the process container, in which a rotating table for mounting a substrate is provided, and a heater for heating the process container, comprising: a radiation temperature measurement unit configured to measure the temperature of plural temperature measurement areas on a surface of the rotating table in a radius direction of…
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Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
- H10P95/90Primary
Electricity · mapped topic
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- What does patent US8992079B2 cover?
- A temperature measurement apparatus for estimating a temperature profile in a process container, includes a radiation temperature measurement unit configured to measure the temperature of plural temperature measurement areas at a surface of the rotating table in a radius direction of the rotating table by scanning the surface of the rotating table in the radius direction; an operation control u…
- Who is the assignee on this patent?
- Moroi Masayuki, Kikuchi Hitoshi, Koakutsu Masato, and 1 more
- What technology area does this patent fall under?
- Primary CPC classification H10P95/90. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Mar 31 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).