Reduced capacity carrier, transport, load port, buffer system
US-9224628-B2 · Dec 29, 2015 · US
Lid opening and closing device
US8936050B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8936050-B2 |
| Application number | US-201213420097-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 14, 2012 |
| Priority date | Mar 16, 2011 |
| Publication date | Jan 20, 2015 |
| Grant date | Jan 20, 2015 |
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- Title
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- Abstract
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- Assignees and inventors
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- First independent claim
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Abstract
Official abstract text for this publication.
A lid opening and closing device for a semiconductor manufacturing apparatus having a partition wall configured to divide a carrier conveying region and a substrate conveying region, the partition wall having a conveying gateway with an edge portion, includes an exhaust port configured to discharge therethrough an atmospheric gas from a closed space formed between a carrier making contact with the edge portion of the conveying gateway and an opening/closing door, and a purge gas injecting part provided in the opening/closing door. The purge gas injecting part is configured to enter the internal space of a carrier lid through an opening formed on the front surface of the carrier lid, to inject a purge gas into the internal space of the carrier lid and to discharge an atmospheric gas existing in the internal space of the carrier lid into the closed space through another opening of the carrier lid.
First claim
Opening claim text (preview).
What is claimed is: 1. A lid opening and closing device for a semiconductor manufacturing apparatus which comprises: a partition wall configured to divide a carrier conveying region and a substrate conveying region, the partition wall having a conveying gateway with an edge portion; a carrier including a carrier body and a carrier lid configured to removably engage with the carrier body, the carrier body having a substrate takeout opening with an edge part, the carrier lid havin…
Assignees
Inventors
Classifications
- H10P72/3406Primary
Electricity · mapped topic
- H01L21/67772Primary
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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Frequently asked questions
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- What does patent US8936050B2 cover?
- A lid opening and closing device for a semiconductor manufacturing apparatus having a partition wall configured to divide a carrier conveying region and a substrate conveying region, the partition wall having a conveying gateway with an edge portion, includes an exhaust port configured to discharge therethrough an atmospheric gas from a closed space formed between a carrier making contact with …
- Who is the assignee on this patent?
- Sugawara Yudo, Tokyo Electron Ltd
- What technology area does this patent fall under?
- Primary CPC classification H10P72/3406. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Jan 20 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).