Methods for fabricating an electromechanical switch

Patent metadata

Field	Value
Publication number	US-8925183-B2
Application number	US-201314031506-A
Country	US
Kind code	B2
Filing date	Sep 19, 2013
Priority date	Aug 31, 2012
Publication date	Jan 6, 2015
Grant date	Jan 6, 2015

Abstract

A nano-electro-mechanical switch includes an input electrode, a body electrode, an insulating layer, an actuator electrode, an output electrode, and a cantilever beam adapted to flex in response to an actuation voltage applied between the body electrode and the actuator electrode. The cantilever beam includes the input electrode, the body electrode and the insulating layer, the latter separating the body electrode from the input electrode, the cantilever beam being configured such that, upon flexion of the cantilever beam, the input electrode comes in contact with the output electrode at a single mechanical contact point at the level of an end of the cantilever beam.

First claim

The invention claimed is:

1. A method for fabricating a nano-electromechanical switch, the method comprising:
forming a first layer corresponding to a body electrode;
forming a second layer adjacent to the first layer, the second layer corresponding to an insulating layer;
forming a third layer adjacent to the second layer, the third layer corresponding to an input electrode, wherein the insulating layer separates and insulates the body electrode from the input electrode;
forming an actuator electrode;
forming an output electrode; and
forming a cantilever beam adapted to flex in response to an actuation voltage applied between the body electrode and the actuator electrode, wherein the cantilever beam comprises the input electrode, the body electrode and the insulating layer adjacent a first end of the cantilever beam, the output electrode adjacent a second end of the cantilever beam opposite the first end, and the actuator electrode disposed between the first end and the second end of the cantilever beam, such that, upon flexion of the cantilever beam in response to an actuation voltage applied between the body electrode and the actuator electrode, the input electrode comes in contact with the output electrode at a single mechanical contact point at the level the second end of the cantilever beam.

2. The method of claim 1 , further comprising uncovering the end of the cantilever beam.

3. The method of claim 1 , wherein the cantilever beam is curved when the actuation voltage is not applied.

4. A method for fabricating a nano-electromechanical switch, the method, comprising:
forming an input electrode;
forming a body electrode;
forming an insulating layer;
forming an actuator electrode;
forming an output electrode;
forming a cantilever beam adapted to flex in response to an actuation voltage applied between the body electrode and the actuator electrode, wherein the cantilever beam comprises the input electrode, the body electrode and the insulating layer, the latter separating the body electrode from the input electrode, the cantilever beam being configured such that, upon flexion of the cantilever beam, the input electrode comes in contact with the output electrode at a single mechanical contact point at the level of an end of the cantilever beam; and
uncovering the end of the cantilever beam, wherein forming the cantilever beam further comprises:
etching, on a silicon on insulator wafer, a silicon device layer;
depositing a lateral source conductive layer;
depositing an isolation layer;
depositing a lateral body conductive layer;
partially removing the isolation layer and the lateral source and body conductive layers;
etching the lateral body conductive layer and the isolation layer to form the body electrode;
etching the lateral body conductive layer and the isolation layer to partially uncover the lateral source conductive layer;
depositing a sacrificial layer so as to define a gap;
depositing a second sacrificial layer so as to define a mold for electrode material;
depositing the electrode material;
removing excessive electrode material and of mold corresponding to the second sacrificial material; and
performing final etching to release the cantilever beam.

5. The method of claim 4 , wherein the deposition of a lateral source conductive layer is obtained by the evaporation of Pt and a rapid thermal annealing to create a PtSi layer on the silicon device layer, corresponding to the lateral source conductive layer.

6. The method of claim 4 , wherein the second sacrificial layer comprises Cu.

7. The method of claim 4 , wherein the electrode material comprises Pt.

8. The method of claim 4 , wherein the lateral body conductive layer comprises one or more of: Pt, Mo, W, TiN, and Ta.

Assignees

• IBM

Inventors

• Despont Michel
• Drechsler Ute
• Grogg Daniel
• Hagleitner Christoph
• Pu Yu

Classifications

• H01H1/0094 Primary

  Switches making use of nanoelectromechanical systems [NEMS] · CPC title

• H01H49/00 Primary

  Apparatus or processes specially adapted to the manufacture of relays or parts thereof · CPC title

• H01H59/0009

  making use of micromechanics · CPC title

• Y10T29/49155

  Manufacturing circuit on or in base · CPC title

• Y10T29/49117

  Conductor or circuit manufacturing · CPC title