Semiconductor manufacturing apparatus and method for manufacturing semiconductor device

Patent metadata

Field	Value
Publication number	US-2026024727-A1
Application number	US-202519071853-A
Country	US
Kind code	A1
Filing date	Mar 6, 2025
Priority date	Jul 17, 2024
Publication date	Jan 22, 2026
Grant date	—

Abstract

According to one embodiment, a semiconductor manufacturing apparatus includes a chamber that is used for deposition of an oxide film, a susceptor that is provided in the chamber and on which a substrate is placed, at least a supply pipe that supplies a gas to the chamber, an exhaust pipe that exhausts the gas from the chamber, and a controller that is configured to control supply of each of a first source gas, an oxidizing gas, a reducing gas activated by plasma, and a first halide gas activated by plasma to the chamber, and gas exhaust from the chamber.

First claim

What is claimed is:

1 . A semiconductor manufacturing apparatus comprising:
a chamber that is used for deposition of an oxide film; a susceptor that is provided in the chamber, and on which a substrate is placed; at least a supply pipe that supplies a gas to the chamber; an exhaust pipe that exhausts the gas from the chamber; and a controller that is configured to control supply of each of a first source gas, an oxidizing gas, a reducing gas activated by plasma, and a first halide gas activated by plasma to the chamber, and gas exhaust from the chamber.

2 . The semiconductor manufacturing apparatus according to claim 1 , wherein
the first source gas contains at least one element selected from Xe, Tl, F, Ag, Au, I, Cd, Br, Pd, Zn, Hg, Na, Rb, Cu, Cs, Bi, Li, In, Mg, Mn, Ni, and Ga.

3 . The semiconductor manufacturing apparatus according to claim 1 , wherein
the controller is further configured to control supply of a second source gas different from the first source gas to the chamber.

4 . The semiconductor manufacturing apparatus according to claim 1 , wherein
the first halide gas is at least one of NF 3 , F 2 , HF, SF 6 , BCl 3 , Cl 2 , HCl, ClF 3 , Br 2 , HBr, I 2 , and HI.

5 . The semiconductor manufacturing apparatus according to claim 1 , wherein
the supply of the reducing gas and the supply of the first halide gas are repeatedly performed.

6 . The semiconductor manufacturing apparatus according to claim 1 , further comprising
a water detection system that is coupled to the exhaust pipe, and detects water contained in an exhaust gas from the chamber.

7 . The semiconductor manufacturing apparatus according to claim 1 , further comprising
a heating device that heats hydrogen, wherein the heated hydrogen is supplied to the chamber.

8 . The semiconductor manufacturing apparatus according to claim 1 , wherein
the controller is further configured to control supply of a second halide gas to the chamber, the second halide gas being activated by plasma and containing a halogen element different from the first halide gas.

9 . The semiconductor manufacturing apparatus according to claim 8 , wherein
the supply of the reducing gas, the supply of the first halide gas, and the supply of the second halide gas are repeatedly performed.

10 . A method for manufacturing a semiconductor device, the method comprising:
carrying a substrate into a chamber having an inner wall; supplying a first source gas and an oxidizing gas to the chamber to form an oxide film on the substrate, after the carrying the substrate into the chamber; carrying the substrate, on which the oxide film is formed, out of the chamber; supplying an activated reducing gas to the chamber, after the carrying the substrate out of the chamber; and supplying an activated first halide gas to the chamber, after the supplying the activated reducing gas.

11 . The method according to claim 10 , wherein
the supplying the activated reducing gas and the supplying the activated first halide gas are repeatedly performed.

12 . The method according to claim 10 , wherein
after the supplying the activated reducing gas is started, water contained in an exhaust gas from the chamber is detected, and, in a case where a detected value of water is greater than a preset value, the supplying the activated reducing gas is again performed.

13 . The method according to claim 10 , wherein
the oxide film adhering to the inner wall during a formation of the oxide film is reduced by the activated reducing gas.

14 . The method according to claim 13 , wherein
the reduced oxide film is etched using the activated first halide gas.

15 . The method according to claim 10 , wherein
the oxide film contains O and at least one element selected from Xe, Tl, F, Ag, Au, I, Cd, Br, Pd, Zn, Hg, Na, Rb, Cu, Cs, Bi, Li, In, Mg, Mn, Ni, and Ga.

16 . The method according to claim 15 , wherein
the oxide film is InGaZnO.

17 . The method according to claim 14 , wherein
the first halide gas is at least one of NF 3 , F 2 , HF, SF 6 , BCl 3 , Cl 2 , HCl, ClF 3 , Br 2 , HBr, I 2 , and HI.

18 . The method according to claim 10 , further comprising
supplying a heated hydrogen to the chamber, after the supplying the activated reducing gas.

19 . The method according to claim 10 , further comprising
supplying an activated second halide gas to the chamber, after the supplying the activated first halide gas, the second halide gas being containing a halogen element different from the first halide gas.

20 . The method according to claim 19 , wherein
the supplying the activated reducing gas, the supplying the activated first halide gas, and the supplying the activated second halide gas are repeatedly performed.

Assignees

• Kioxia Corp
• Tokyo Electron Ltd

Inventors

• Toratani Kenichiro
• Matsuo Kazuhiro
• Moriyama Wakako
• Takahashi Kota
• Toda Masaya
• Hoang Ha
• Mori Shinji
• Sawa Keiichi
• Ishimaru Tomoki
• Nagata Yuya
• Neishi Koji
• Watanabe Masahisa
• Yagi Hironori
• Nakajima Shigeru

Classifications

• H10P14/3434 Primary

  being oxide semiconductor materials (Group IIB-VIA semiconductor materials H10P14/3424) · CPC title

• C23C16/52

  Controlling or regulating the coating process {(C23C16/45557, C23C16/279 take precedence)} · CPC title

• H01J2237/332

  Coating · CPC title

• C23C16/407

  of zinc, germanium, cadmium, indium, tin, thallium or bismuth · CPC title

• C23C16/4412

  Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps · CPC title