High temperature biasable heater with advanced far edge electrode, electrostatic chuck, and embedded ground electrode
US-2024412957-A1 · Dec 12, 2024 · US
Electrostatic chuck
US2025069933A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2025069933-A1 |
| Application number | US-202418806123-A |
| Country | US |
| Kind code | A1 |
| Filing date | Aug 15, 2024 |
| Priority date | Aug 21, 2023 |
| Publication date | Feb 27, 2025 |
| Grant date | — |
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- Title
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- Abstract
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- First independent claim
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Abstract
Official abstract text for this publication.
An electrostatic chuck 10 includes a dielectric substrate 100, a base plate 200, and a joining layer 300 which joins the dielectric substrate 100 and the base plate 200. The joining layer 300 is obtained by containing a plurality of particulate filler materials 320 inside resin 310. The content of the filler materials 320 in the joining layer 300 is equal to or lower than 70% by weight.
First claim
Opening claim text (preview).
What is claimed is: 1 . An electrostatic chuck comprising: a dielectric substrate; a base plate; and a joining layer which joins the dielectric substrate and the base plate, wherein the joining layer is obtained by containing a plurality of particulate filler materials inside resin, and a content of the filler materials in the joining layer is equal to or lower than 70% by weight. 2 . The electrostatic chuck according to claim 1 , wherein the resin is silicone. 3 . The electrostatic chuck according to claim 1 , wherein the filler materials contain alumina as a major component. 4 . The electrostatic chuck according to claim 1 , wherein a thickness of the joining layer is equal to or lower than 0.3 mm. 5 . The electrostatic chuck according to claim 1 , wherein a shape of at least a part of the filler materials is spherical.
Assignees
Inventors
Classifications
- H10P72/722Primary
Details of electrostatic chucks · CPC title
using electrostatic chucks · CPC title
Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating · CPC title
by means of an interlayer consisting of an organic adhesive, e.g. phenol resin or pitch · CPC title
Workpiece holder · CPC title
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Frequently asked questions
Answers are generated from the same data shown on this page.
- What does patent US2025069933A1 cover?
- An electrostatic chuck 10 includes a dielectric substrate 100, a base plate 200, and a joining layer 300 which joins the dielectric substrate 100 and the base plate 200. The joining layer 300 is obtained by containing a plurality of particulate filler materials 320 inside resin 310. The content of the filler materials 320 in the joining layer 300 is equal to or lower than 70% by weight.
- Who is the assignee on this patent?
- Toto Ltd
- What technology area does this patent fall under?
- Primary CPC classification H10P72/722. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Thu Feb 27 2025 00:00:00 GMT+0000 (Coordinated Universal Time) (A1). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).