Bioderived organic solvents

Patent metadata

Field	Value
Publication number	US-2024408590-A1
Application number	US-202418734029-A
Country	US
Kind code	A1
Filing date	Jun 5, 2024
Priority date	Jun 9, 2023
Publication date	Dec 12, 2024
Grant date	—

Abstract

The present disclosure is directed to methods and systems of purifying bioderived organic solvents. The purified bioderived organic solvents can be used in a multistep semiconductor manufacturing process.

First claim

What is claimed is:

1 . A method of purifying a bioderived organic solvent, comprising:
(1) passing the bioderived organic solvent through an ion exchange filter unit, wherein the ion exchange filter unit includes a housing and at least one first ion exchange filter and at least one second ion exchange filter in the housing, wherein the at least one first ion exchange filter and the at least one second ion exchange filter are both negatively charged ion exchange filters and are connected in series, and wherein the at least one first ion exchange filter is different from the at least one second ion exchange filter; (2) passing the bioderived organic solvent through at least one column containing an adsorbent to remove water in the bioderived organic solvent; and (3) distilling the bioderived organic solvent in a distillation column to obtain a purified bioderived organic solvent; wherein the bioderived organic solvent is obtained from a biological feedstock, the purified bioderived organic solvent comprises an acid component in an amount of from about 0.1 ppb by mass to about 1000 ppm by mass, and the purified bioderived organic solvent comprises water in an amount of from about 0.1 ppb by mass to about 1000 ppm by mass.

2 . The method of claim 1 , wherein the bioderived organic solvent comprises a lactone, a ketone, an ether, an alkyl aromatic, an alcohol, or an alkyl alicyclic.

3 . The method of claim 2 , wherein the bioderived organic solvent comprises gamma-valerolactone, cyrene, 2-methyl tetrahydrofuran, glycerol, pinene, limonene, or cymene.

4 . The method of claim 2 , wherein the lactone is gamma-valerolactone.

5 . The method of claim 2 , wherein the ketone is cyrene.

6 . The method of claim 2 , wherein the ether is 2-methyl tetrahydrofuran.

7 . The method of claim 1 , wherein the biological feedstock is selected from the group consisting of lignocellulosic biomasses, sugar cane, corn, vegetable oils, oil wastes, or citrus wastes.

8 . The method of claim 1 , wherein the purified bioderived organic solvent comprises a metal component in an amount of from about 10 ppt by mass to about 500 ppb by mass.

9 . The method of claim 1 , wherein the purified bioderived organic solvent comprises a total amount of metal components from about 50 ppt to about 500 ppb.

10 . The method of claim 1 , wherein the bioderived organic solvent is a lactone or an ether, and the purified bioderived organic solvent comprises an acid component in an amount of from about 0.1 ppb by mass to about 100 ppb by mass.

11 . The method of claim 1 , wherein the bioderived organic solvent comprises water in an amount of from about 10 ppb by mass to about 100 ppm by mass.

12 . A purified bioderived organic solvent prepared from the method of claim 1 .

13 . A purified bioderived organic solvent, wherein
the bioderived organic solvent is obtained from a biological feedstock; the bioderived organic solvent comprises an acid component in an amount of from about 0.1 ppb by mass to about 1000 ppm by mass; and the bioderived organic solvent comprises water in an amount of from about 0.1 ppb by mass to about 1000 ppm by mass.

14 . The organic solvent of claim 13 , wherein the bioderived organic solvent comprises a lactone, a ketone, an ether, an alkyl aromatic, an alcohol, or an alkyl alicyclic.

15 . The organic solvent of claim 14 , wherein the bioderived organic solvent comprises gamma-valerolactone, cyrene, 2-methyl tetrahydrofuran, glycerol, pinene, limonene, or cymene.

16 . A method of preparing a polymer, comprising:
forming a polymer comprising a polyimide precursor polymer, a polybenzoxazole precursor polymer, or a fully imidized polyimide polymer in a solvent system containing at least one first organic solvent and optionally, at least one second organic solvent; wherein the at least one first organic solvent comprises the purified bioderived organic solvent of claim 13 , the bioderived organic solvent is an aprotic polar solvent selected from the group consisting of lactones, ketones, ethers, alkyl aromatics, and alkyl alicyclics, and the at least one second organic solvent comprises a carbonyl group.

17 . A photosensitive composition, comprising
at least one resin selected from the group consisting of epoxy resins, novolak resins, polyamide resins, polybenzoxazole precursor polymers, polyimide precursor polymers, and fully imidized polyimide polymers; and a solvent system containing at least one first organic solvent and optionally, at least one second organic solvent; wherein the at least one first organic solvent comprises the purified bioderived organic solvent of claim 13 , the bioderived organic solvent is a solvent selected from the group consisting of lactones, ketones, ethers, alcohols, alkyl aromatics, and alkyl alicyclics, and the at least one second organic solvent comprises a carbonyl group.

18 . The composition of claim 17 , further comprising at least one cyanate ester compound, the at least one cyanate ester compound comprising at least two cyanate groups.

19 . The composition of claim 17 , further comprising at least one reactive functional compound.

20 . The composition of claim 19 , wherein the at least one reactive functional compound is a di(meth)acrylate containing cross-linker in an amount of from about 5 percent to about 50 percent by weight of the resin.

21 . A pattern forming method, comprising:
(a) disposing a photosensitive composition on a substrate to form a film; (b) exposing the film to radiation, heat, or a combination thereof; and (c) developing the exposed film using an organic developer to form a pattern on the substrate; wherein the organic developer comprises the purified bioderived organic solvent of claim 13 .

Assignees

• Fujifilm Electronic Mat Usa Inc

Inventors

• Malik Sanjay
• Reinerth William A
• De Binod B
• Dilocker Stephanie
• Sakamuri Raj

Classifications

• G03F7/0048 Primary

  characterised by the solvents or agents facilitating spreading, e.g. tensio-active agents · CPC title

• G03F7/325

  Non-aqueous compositions · CPC title

• B01J41/10

  Inorganic material · CPC title

• B01J47/02

  Column or bed processes · CPC title

• B01J41/02 Primary

  Processes using inorganic exchangers · CPC title