Atomic layer deposition part coating chamber

Patent metadata

Field	Value
Publication number	US-2024093367-A1
Application number	US-202217946842-A
Country	US
Kind code	A1
Filing date	Sep 16, 2022
Priority date	Sep 16, 2022
Publication date	Mar 21, 2024
Grant date	—

Abstract

Embodiments of part coating reactors are provided herein. In some embodiments, a part coating reactor includes a lid assembly, comprising: a body that includes a central region and a peripheral region, wherein the body includes a central opening in the central region, a first annular heater groove disposed radially outward of the central opening, and a second annular heater groove disposed radially outward of the first annular heater groove, wherein the peripheral region includes a plurality of vertical slots that extend from an upper surface of the body, and wherein a lower surface of the body includes an annular alignment groove; and a blocker plate including a substantially flat plate having a plurality of holes disposed therethrough and an annular wall extending above and below the flat plate, wherein an upper surface of the annular wall is disposed in the annular alignment groove of the body.

First claim

1 . A part coating reactor, comprising:
a lid assembly, comprising:
a body that includes a central region and a peripheral region, wherein the body includes a central opening in the central region, a first annular heater groove disposed radially outward of the central opening, and a second annular heater groove disposed radially outward of the first annular heater groove, wherein the peripheral region includes a plurality of vertical slots that extend from an upper surface of the body, wherein the body includes an annular recess that extends from the upper surface of the body, an annular purge gas groove that extends from a floor of the annular recess, and a plurality of gas supply openings extending from the purge gas groove to a lower surface of the body, and wherein a lower surface of the body includes an annular alignment groove;
a first heater ring disposed in the first annular heater groove and having one or more heating elements disposed therein; and
a second heater ring disposed in the second annular heater groove and having one or more heating elements disposed therein; and
a blocker plate including a substantially flat plate having a plurality of holes disposed therethrough and an annular wall extending above and below the flat plate, wherein an upper surface of the annular wall is disposed in the annular alignment groove of the body.

2 . The part coating reactor of claim 1 , wherein the plurality of holes of the blocker plate comprise a central hole and a plurality of peripheral holes, wherein the central hole has a diameter smaller than a diameter of the plurality of peripheral holes.

3 . The part coating reactor of claim 1 , wherein the alignment groove is disposed radially inward of the plurality of gas supply openings.

4 . The part coating reactor of claim 1 , wherein the body includes a plurality of horizontal slots arranged along two or more vertical rows and extending from an outer sidewall of the body to a location radially outward of the plurality of vertical slots.

5 . The part coating reactor of claim 1 , further comprising a cap disposed in the annular recess to cover the annular purge gas groove, wherein the cap includes one or more gas inlet holes.

6 . The part coating reactor of claim 1 , wherein the body includes one or more openings on a sidewall of the body configured for coupling a gas supply line to the body.

7 . The part coating reactor of claim 1 , further comprising a cover plate disposed atop the first heater ring and the second heater ring, wherein the cover plate is a circular plate.

8 . The part coating reactor of claim 1 , wherein the lid assembly includes a plurality of service openings disposed between the annular recess and the plurality of vertical slots configured for installing and removing the lid assembly from the part coating reactor.

9 . A part coating reactor, comprising:
a lid assembly having a body that includes a central region and a peripheral region, wherein the body includes a central opening in the central region, a first heater ring disposed in a first annular heater groove disposed radially outward of the central opening, and a second heater ring disposed in a second annular heater groove disposed radially outward of the first annular heater groove, wherein the peripheral region includes a plurality of vertical slots that extend from an upper surface of the body, wherein the body includes an annular gas supply groove that extends from the upper surface of the body, an annular purge gas groove that extends from a floor of the annular gas supply groove, and a plurality of gas supply openings extending from the purge gas groove to a lower surface of the body; a cap disposed in the annular gas supply groove to define a first plenum in the annular gas supply groove, wherein the cap includes one or more gas inlet holes; a bottom lid coupled to the lid assembly to enclose and define an interior volume of the part coating reactor; a blocker plate disposed in the interior volume adjacent the lid assembly and including a substantially flat plate having a plurality of holes disposed therethrough and an annular wall extending above and below the flat plate, wherein the blocker plate and the lid assembly define a mixing plenum therebetween; and a liner disposed about the blocker plate and coupled to the body.

10 . The part coating reactor of claim 9 , further comprising a pedestal heater disposed in the interior volume opposite the blocker plate.

11 . The part coating reactor of claim 9 , wherein the liner includes a plurality of slots and a plurality of openings for coupling the liner to a workpiece.

12 . The part coating reactor of claim 9 , wherein the cap includes an o-ring groove disposed about each of the one or more gas inlet holes.

13 . The part coating reactor of claim 9 , wherein the plurality of holes of the blocker plate increase in diameter from an upper surface of the blocker plate to a lower surface of the blocker plate.

14 . The part coating reactor of claim 9 , wherein the body further comprises a first o-ring groove extending from the floor of the annular gas supply groove radially inward of the annular purge gas groove, and a second o-ring groove extending from the floor of the annular gas supply groove radially outward of the annular purge gas groove.

15 . A process chamber, comprising:
a lid assembly having a body that includes a central region and a peripheral region, wherein the body includes a central opening in the central region, a first heater ring disposed in a first annular heater groove disposed radially outward of the central opening, and a second heater ring disposed in a second annular heater groove disposed radially outward of the first annular heater groove, wherein the peripheral region includes a plurality of vertical slots that extend from an upper surface of the body, wherein the body includes an annular gas supply groove that extends from the upper surface of the body, an annular purge gas groove that extends from a floor of the annular gas supply groove, and a plurality of gas supply openings extending from the purge gas groove to a lower surface of the body; a cap disposed in the annular gas supply groove to cover the annular purge gas groove, wherein the cap includes one or more gas inlet holes; a cover plate disposed atop the first heater ring and the second heater ring; a bottom lid coupled to the lid assembly to enclose and define an interior volume of the process chamber; a blocker plate disposed in the interior volume adjacent the lid assembly and including a substantially flat plate having a plurality of holes disposed therethrough and an annular wall extending above and below the flat plate, wherein the blocker plate and the lid assembly define a mixing plenum therebetween; a liner disposed about the blocker plate and coupled to the lid assembly, the liner having a plurality slots; and a pedestal heater disposed in the interior volume.

16 . The process chamber of claim 15 , wherein a purge gas source is coupled to the annular purge gas groove.

17 . The process chamber of claim 15 , further comprising a gas source coupled to the central opening of the body.

18 . The process chamber of claim 15 , wherein the body includes a plurality of horizontal slots extending from an outer sidewall of the body to a location radially outward of the plurality of vertical slots.

19 . The process chamber of claim 15 , wherein the blocker plate is held between the lid assembly and a workpiece being processed in the process chamber.

Assignees

• Applied Materials Inc

Inventors

• Dharmapura Sathyanarayanamurthy Sriharsha
• Panavalappil Kumarankutty Hanish Kumar
• Shanmugam Kirubanandan Naina
• Shanmugasundaram Manojkumar
• Srinivasan Sriharish

Classifications

• C23C16/4586

  Elements in the interior of the support, e.g. electrodes, heating or cooling devices · CPC title

• C23C16/4408

  by purging residual gases from the reaction chamber or gas lines · CPC title

• C23C16/4557 Primary

  Heated nozzles · CPC title

• C23C16/45565

  Shower nozzles · CPC title

• C23C16/46

  characterised by the method used for heating the substrate (C23C16/48, C23C16/50 take precedence) · CPC title