Flexible sensor apparatus
US-10161737-B2 · Dec 25, 2018 · US
Strain gauge
US2022411915A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2022411915-A1 |
| Application number | US-202217929830-A |
| Country | US |
| Kind code | A1 |
| Filing date | Sep 6, 2022 |
| Priority date | Sep 29, 2017 |
| Publication date | Dec 29, 2022 |
| Grant date | — |
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Abstract
Official abstract text for this publication.
A strain gauge includes a flexible substrate and a functional layer formed of a metal, an alloy, or a metal compound, the functional layer being directly on one surface of the substrate. The strain gauge includes a resistor formed of a film that includes Cr, CrN, and Cr2N and that is formed with α-Cr as a main component. The functional layer includes a function of promoting crystal growth of α-Cr and forming an α-Cr based film.
First claim
Opening claim text (preview).
What is claimed is: 1 . A strain gauge comprising: a flexible substrate; a functional layer formed of a metal, an alloy, or a metal compound, directly on one surface of the substrate; and a resistor formed of a film that includes Cr, CrN, and Cr 2 N and that is formed with α-Cr as a main component, wherein the functional layer includes a function of promoting crystal growth of α-Cr and forming an α-Cr based film. 2 . The strain gauge according to claim 1 , wherein the functional layer further includes one or more metals selected from the group consisting of Cr, Ti, V, Nb, Ta, Ni, Y, Zr, Hf, Si, C, Zn, Cu, Bi, Fe, Mo, W, Ru, Rh, Re, Os, Ir, Pt, Pd, Ag, Au, Co, Mn, and Al; an alloy of any metals from among the group; or a compound of any metal from among the group. 3 . The strain gauge according to claim 1 , wherein the functional layer further includes one or more metals selected from the group consisting of Cr, V, Nb, Ta, Ni, Y, Hf, C, Zn, Bi, Fe, Mo, W, Ru, Rh, Re, Os, Ir, Pt, Pd, Ag, Au, Co, and Mn; an alloy of any metals from among the group; or a compound of any metal from among the group. 4 . The strain gauge according to claim 1 , wherein the functional layer further includes one alloy selected from the group consisting of FeCr, TiAl, FeNi, NiCr, and CrCu. 5 . The strain gauge according to claim 1 , wherein the functional layer protects the resistor from oxidation; suppresses movement of oxygen and moisture present in the substrate into the resistor; and/or improves adhesion between the substrate and the resistor. 6 . The strain gauge according to claim 1 , wherein the functional layer is patterned in a same planar shape as the resistor. 7 . The strain gauge according to claim 1 , wherein the functional layer has a thickness of from 1 nm to 100 nm.
Assignees
Inventors
Classifications
characterised by means for introducing or removing gases · CPC title
Glass or silica · CPC title
Oxides (C23C14/10 takes precedence) · CPC title
- G01B7/20Primary
formed by printed-circuit technique · CPC title
using resistance strain gauges · CPC title
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- What does patent US2022411915A1 cover?
- A strain gauge includes a flexible substrate and a functional layer formed of a metal, an alloy, or a metal compound, the functional layer being directly on one surface of the substrate. The strain gauge includes a resistor formed of a film that includes Cr, CrN, and Cr2N and that is formed with α-Cr as a main component. The functional layer includes a function of promoting crystal growth of α-…
- Who is the assignee on this patent?
- Minebea Mitsumi Inc
- What technology area does this patent fall under?
- Primary CPC classification G01B7/20. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Thu Dec 29 2022 00:00:00 GMT+0000 (Coordinated Universal Time) (A1). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).