Substrate cleaning device, abnormality determination method of substrate cleaning device, storage medium

Patent metadata

Field	Value
Publication number	US-2022258217-A1
Application number	US-202217670522-A
Country	US
Kind code	A1
Filing date	Feb 14, 2022
Priority date	Feb 15, 2021
Publication date	Aug 18, 2022
Grant date	—

Abstract

Provided is a substrate cleaning device, an abnormality determination method of a substrate cleaning device, and an abnormality determination program of a substrate cleaning device for determining whether there is an abnormality in a roll cleaning member that is attached. A substrate cleaning device includes: a holder to which a roll cleaning member for cleaning a substrate is attached in a detachable manner; a rotation device which makes the roll cleaning member attached to the holder rotate; a sensor which measures information concerning a vibration of the roll cleaning member during rotation; and a control device which determines, based on a measurement result of the sensor, whether there is an abnormality in the roll cleaning member attached to the holder.

First claim

What is claimed is:

1 . A substrate cleaning device, comprising:
a holder to which a roll cleaning member for cleaning a substrate is attached in a detachable manner; a rotation device which makes the roll cleaning member attached to the holder rotate; a sensor which measures information concerning a vibration of the roll cleaning member during rotation; and a control device which determines, based on a measurement result of the sensor, whether there is an abnormality in the roll cleaning member attached to the holder.

2 . The substrate cleaning device according to claim 1 , wherein the control device determines, based on an amplitude of the roll cleaning member during rotation, whether there is an abnormality in the roll cleaning member attached to the holder.

3 . The substrate cleaning device according to claim 1 , wherein the control device makes the roll cleaning member rotate by the rotation device in a state that the roll cleaning member is moistened, and determines whether there is an abnormality in the roll cleaning member attached to the holder.

4 . The substrate cleaning device according to claim 1 , wherein the control device makes the roll cleaning member rotate by the rotation device and determines whether there is an abnormality in the roll cleaning member attached to the holder at least after the roll cleaning member is attached to the holder and before the substrate is cleaned.

5 . The substrate cleaning device according to claim 1 , wherein the sensor is a load cell installed on the holder.

6 . The substrate cleaning device according to claim 1 , wherein the roll cleaning member has a plurality of protrusion portions on a peripheral surface.

7 . The substrate cleaning device according to claim 1 , wherein the control device makes the roll cleaning member rotate by the rotation device in a state that a peripheral surface of the roll cleaning member is not in contact with an object, and determines whether there is an abnormality in the roll cleaning member attached to the holder.

8 . An abnormality determination method of a substrate cleaning device, wherein
the substrate cleaning device comprises: a holder to which a roll cleaning member for cleaning a substrate is attached in a detachable manner; a rotation device which makes the roll cleaning member attached to the holder rotate; and a sensor which measures information concerning a vibration of the roll cleaning member during rotation, and the abnormality determination method of the substrate cleaning device determines, based on a measurement result of the sensor, whether there is an abnormality in the roll cleaning member attached to the holder.

9 . A non-transitory computer readable storage medium, storing an abnormality determination program of a substrate cleaning device, wherein
the substrate cleaning device comprises: a holder to which a roll cleaning member for cleaning a substrate is attached in a detachable manner; a rotation device which makes the roll cleaning member attached to the holder rotate; and a sensor which measures information concerning a vibration of the roll cleaning member during rotation, and the abnormality determination program of the substrate cleaning device causes a computer of the substrate cleaning device to determine, based on a measurement result of the sensor, whether there is an abnormality in the roll cleaning member attached to the holder.

Assignees

• Ebara Corp

Inventors

• Nishijima Masumi
• Matsushita Kunimasa
• Ishikawa Hiroshi

Classifications

• H10P72/0412 Primary

  using mainly scrubbing means, e.g. brushes · CPC title

• B08B1/34

  rotating about an axis parallel to the surface · CPC title

• B08B13/00 Primary

  Accessories or details of general applicability for machines or apparatus for cleaning · CPC title

• G01M7/00

  Vibration-testing of structures; Shock-testing of structures (G01M9/00 takes precedence) · CPC title

• G01L5/0076

  Force sensors associated with manufacturing machines (G01L5/0066, G01L5/0071 and B23Q17/09 take precedence; for the specific machine or operation involved see relevant class, e.g. B21 - B42) · CPC title