Substrate cleaning device, abnormality determination method of substrate cleaning device, storage medium
US-11911806-B2 · Feb 27, 2024 · US
This page is not indexed by search engines while we improve data quality.
Patent family 82801921
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 82801921 |
| Family type | — |
| Earliest priority | Feb 15, 2021 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US11911806B2 — Substrate cleaning device, abnormality determination method of substrate cleaning device, storage medium |
Representative publication
Best representative member for this family based on priority and filing country.
US11911806B2 — Substrate cleaning device, abnormality determination method of substrate cleaning device, storage medium (published Feb 27, 2024)
Member publications
Related publications in this family.