Through glass via fabrication using a protective material
US-2021187910-A1 · Jun 24, 2021 · US
US2022193829A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2022193829-A1 |
| Application number | US-202117479457-A |
| Country | US |
| Kind code | A1 |
| Filing date | Sep 20, 2021 |
| Priority date | Dec 22, 2020 |
| Publication date | Jun 23, 2022 |
| Grant date | — |
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A manufacturing method of a display device includes: forming a laminate by laminating resins on first and second side surfaces of a glass; removing the resins along a laser irradiation line by irradiating a laser on the laminate; separating the laminate into a plurality of laminates by performing primary etching using an etching liquid composition; vertically stacking the plurality of laminates; and performing secondary chemical etching on a structure formed by stacking the plurality of laminates.
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What is claimed is: 1 . A manufacturing method of a display device, comprising: forming a laminate by laminating resins on first and second side surfaces of a glass; removing the resins along a laser irradiation line by irradiating a laser on the laminate; separating the laminate into a plurality of laminates by performing primary etching using an etching liquid composition; vertically stacking the plurality of laminates; and performing secondary chemical etching on a structure formed by stacking the plurality of laminates. 2 . The manufacturing method of the display device of claim 1 , wherein in the removing of the resins by irradiating the laser on the laminate, a plurality of grooves are formed on the glass along the laser irradiation line. 3 . The manufacturing method of the display device of claim 1 , wherein in the removing of the resins by irradiating the laser on the laminate, physical properties of the glass are changed along the laser irradiation line. 4 . The manufacturing method of the display device of claim 1 , wherein, after the separating the laminate into a plurality of laminates by primary etching the laminate using the etching liquid composition, a curvature radius of the first and second side surfaces of the glass is larger than a curvature radius of the first and second side surfaces of the glass after the secondary chemical etching is performed on the structure on which the plurality of laminates are stacked. 5 . The manufacturing method of the display device of claim 1 , wherein in the separating the laminate into the plurality of laminates through primary etching by using the etching liquid composition, a curvature radius of the first and second side surfaces of the glass is larger than a thickness of the glass. 6 . The manufacturing method of the display device of claim 1 , wherein, after the performing of the secondary chemical etching on the structure formed by stacking the plurality of laminates, a difference between a curvature radius of the first and second side surfaces of the glass and a thickness of the glass is within 10%. 7 . The manufacturing method of the display device of claim 1 , wherein a thickness of the glass is about 30 μm to about 100 μm. 8 . The manufacturing method of the display device of claim 1 , further comprising, after the performing of the secondary chemical etching on the structure formed by stacking the plurality of laminates, separately separating the glass by removing the resin from the structure. 9 . A manufacturing method of a display device, comprising: forming a laminate by laminating resins on first and second side surfaces of a glass; removing the resins along a laser irradiation line by irradiating a laser on the laminate; separating the laminate into a plurality of laminates by performing primary etching using an etching liquid composition; and removing the resin from the laminate. 10 . The manufacturing method of the display device of claim 9 , wherein in the removing of the resins by irradiating the laser on the laminate, a plurality of grooves are formed on the glass along the laser irradiation line. 11 . The manufacturing method of the display device of claim 9 , wherein in the removing of the resins by irradiating the laser on the laminate, physical properties of the glass are changed along the laser irradiation line. 12 . The manufacturing method of the display device of claim 9 , wherein in the separating the laminate into the plurality of laminates through primary etching by using the etching liquid composition, a curvature radius of the first and second side surfaces of the glass is larger than a thickness of the glass. 13 . The manufacturing method of the display device of claim 9 , wherein a thickness of the glass is about 30 μm to about 100 μm. 14 . A manufacturing method of a display device, comprising: irradiating a glass with a laser; and separating the glass irradiated with the laser into a plurality of pieces by performing etching using an etching liquid composition. 15 . The manufacturing method of the display device of claim 14 , wherein in the irradiating the glass with the laser, a plurality of grooves are formed in the glass along a laser irradiation line. 16 . The manufacturing method of the display device of claim 15 , wherein in the irradiating the laser on the glass, physical properties of the glass are changed along the laser irradiation line. 17 . The manufacturing method of the display device of claim 14 , further comprising, after the separating the glass into the plurality of pieces by etching the laser-irradiated glass with the etching liquid composition, performing secondary etching on the separated individual glass. 18 . The manufacturing method of the display device of claim 17 , wherein, after performing the secondary etching on the separated individual glass, a difference between a curvature radius of a side surface of the glass and a thickness of the glass is within 10%. 19 . The manufacturing method of the display device of claim 17 , wherein the separated individual glass is secondarily etched by spinning etching. 20 . The manufacturing method of the display device of claim 14 , wherein a thickness of the glass is about 30 μm to about 100 μm.
Surface treatment of glass, not in the form of fibres or filaments, by etching (etching or surface-brightening compositions, in general C09K13/00) · CPC title
for making a smooth surface · CPC title
by a laser beam · CPC title
Scoring using a focussed radiation beam, e.g. laser · CPC title
taking account of the properties of the material involved · CPC title
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