Aqueous alkaline pre-treatment solution for use prior to deposition of a palladium activation layer, method and use thereof

Patent metadata

Field	Value
Publication number	US-2022033972-A1
Application number	US-201917297483-A
Country	US
Kind code	A1
Filing date	Oct 7, 2019
Priority date	Dec 17, 2018
Publication date	Feb 3, 2022
Grant date	—

Abstract

The invention relates to an aqueous alkaline pre-treatment solution for use prior to deposition of a palladium activation layer on a substrate in manufacturing an article with an integrated circuit and a method and use thereof, wherein the solution comprises:at least one hydroxycarboxylic acid or salt thereof according to the general formula (I)[RCH2—(RCH)n—COO−]m Mm+  (I)wherein n is integer from 2 to 4 and m is 1 or 2,R is independently H or OH with proviso that at least one R is OH, and wherein Mm+ with m: 1 is hydrogen, ammonium or alkali metal; or Mm+ with m: 2 is earth alkali metal,at least one polyoxyethylene sorbitan fatty acid ester,at least one sulphonated fatty acid or a salt thereof.

First claim

1 . Aqueous alkaline pre-treatment solution for comprising:
at least one hydroxycarboxylic acid or salt thereof according to the general formula (I)
[RCH 2 —(RCH) n —COO − ] m M m+   (I)

wherein n is integer from 2 to 4 and m is 1 or 2, R is independently H or OH with proviso that at least one R is OH, and wherein M m+ with m: 1 is hydrogen, ammonium or alkali metal; or M m+ with m: 2 is earth alkali metal,
at least one polyoxyethylene sorbitan fatty acid ester,
at least one sulphonated fatty acid or a salt thereof.

2 . Aqueous alkaline pre-treatment solution according to claim 1 wherein the concentration of the at least one hydroxycarboxylic acid or salt thereof is from 200 to 400 mg/L.

3 . Aqueous alkaline pre-treatment solution according to claim 1 wherein the concentration of the at least one polyoxyethylene sorbitan fatty acid ester is from 0.4 to 1.2 mg/L.

4 . Aqueous alkaline pre-treatment solution according to claim 1 wherein the sulphonated fatty acid is selected from the group consisting of unsaturated branched or unbranched C16 to C20 fatty acids or mixtures thereof.

5 . Aqueous alkaline pre-treatment solution according to claim 1 wherein the concentration of the at least one sulphonated fatty acid is from 4 to 12 mg/L.

6 . Aqueous alkaline pre-treatment solution according to claim 1 wherein the solution has a pH from 8-12.

7 . Method for pre-treatment of a substrate for subsequent deposition of a palladium activation layer on said substrate in manufacturing an article with an integrated circuit comprising the steps in the following order:
(i) providing the substrate having at least one conductive metal layer surface and at least one non-conductive surface; (ii) providing the aqueous alkaline pre-treatment solution according to claim 1 ; (iii) treating the substrate with the pre-treatment solution by bringing the substrate into contact with the aqueous pre-treatment solution.

8 . Method of claim 7 , wherein the method further comprises the step:
(iv) treating the substrate of step (iii) with a palladium activation solution wherein a palladium ion layer is deposited onto the surfaces of the treated substrate of step (iii).

9 . Method of claim 8 wherein the method further comprises the step:
(v) treating a substrate of step (iv) with palladium reduction solution wherein the deposited palladium ion layer in step (iv) is transformed into a metallic palladium layer.

10 . Method according to claim 7 wherein the at least one conductive metal layer surface is a copper layer surface.

11 . Method according to claim 8 wherein the palladium ion layer is deposited onto the at least one non-conductive surface of the treated substrate of step (iii).

12 . Method of using of the aqueous pre-treatment solution according to claim 1 for subsequent deposition of a palladium ion layer on a substrate in manufacturing an article with an integrated circuit wherein the solution is applied directly before applying a palladium activation solution in order to minimize a palladium particle formation while forming the palladium ion layer.

13 . Method of using the aqueous pre-treatment solution according to claim 1 for subsequent deposition of a metal layer in manufacturing an article with an integrated circuit.

14 . Method of using the aqueous pre-treatment solution according to claim 1 for metallization of at least one recessed structure of the at least one non-conductive surface in manufacturing an article with an integrated circuit.

15 . Method according to claim 14 , wherein the at least one recessed structure is selected from the group consisting of blind micro vias (BMVs), through hole vias (THVs), through glass vias (TGVs), through silicon vias (TSVs), buried vias, and mixtures of any of the aforementioned.

Assignees

• Atotech Deutschland Gmbh

Inventors

• Bremmert Stefanie
• Gernhard Marius
• Gregoriades Laurence John
• Wurdinger Kay

Classifications

• H05K2203/0793

  Aqueous alkaline solution, e.g. for cleaning or etching · CPC title

• C23C18/1893 Primary

  with use of organic or inorganic compounds other than metals, first · CPC title

• C23C18/405

  Formaldehyde · CPC title

• H05K3/0055

  After-treatment, e.g. cleaning or desmearing of holes · CPC title

• H05K3/187

  means therefor, e.g. baths, apparatus · CPC title