High brightness laser-sustained plasma broadband source
US-10032619-B2 · Jul 24, 2018 · US
US2021393837A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2021393837-A1 |
| Application number | US-202117352796-A |
| Country | US |
| Kind code | A1 |
| Filing date | Jun 21, 2021 |
| Priority date | Jun 23, 2020 |
| Publication date | Dec 23, 2021 |
| Grant date | — |
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An excimer lamp includes a dielectric tube, an end cap, a conductive hollow tube, and an electrode grid. The dielectric tube has a closed end and an open end, and defines a cavity. The end cap sealingly covers the open end. The conductive hollow tube passes through the end cap and into the cavity of the dielectric tube, with a volume defined between an exterior surface of the conductive hollow tube and an interior surface of the dielectric tube. The volume is configured to hold a gas. The electrode grid is disposed on an exterior surface of the dielectric tube.
Opening claim text (preview).
What is claimed is: 1 . An excimer lamp comprising: a dielectric tube having a closed end and an open end, the dielectric tube defining a cavity; an end cap sealingly covering the open end; a conductive hollow tube passing through the end cap and into the cavity of the dielectric tube, a volume defined between an exterior surface of the conductive hollow tube and an interior surface of the dielectric tube, the volume configured to hold a gas; and an electrode grid disposed on an exterior surface of the dielectric tube. 2 . The excimer lamp of claim 1 , wherein the dielectric tube is made of a quartz material. 3 . The excimer lamp of claim 1 , wherein the end cap is brazed to the dielectric tube. 4 . The excimer lamp of claim 1 , wherein the end cap has a thermal coefficient of expansion that corresponds to a thermal coefficient of expansion of the dielectric tube. 5 . The excimer lamp of claim 1 , wherein the conductive hollow tube is made of stainless steel. 6 . The excimer lamp of claim 1 , wherein the conductive hollow tube is closed on at least one end. 7 . The excimer lamp of claim 6 , wherein the conductive hollow tube comprises a sleeve that comprises circulation holes passing through the sleeve. 8 . The excimer lamp of claim 7 , wherein the conductive hollow tube is configured to allow passage of a cooling fluid. 9 . The excimer lamp of claim 8 , further comprising a cooling tube disposed within the conductive hollow tube. 10 . The excimer lamp of claim 9 , wherein the cooling tube has an open distal end. 11 . The excimer lamp of claim 9 , wherein the cooling tube comprises a cooling sleeve, the cooling sleeve comprising coolant openings passing through the cooling sleeve. 12 . The excimer lamp of claim 1 , wherein the electrode grid is coupled to a ground conductor, and the conductive hollow tube is coupled to a positive conductor. 13 . The excimer lamp of claim 1 , wherein the electrode grid comprises printed wires applied to the exterior surface of the dielectric tube. 14 . The excimer lamp of claim 1 , wherein the electrode grid comprises a sleeve disposed around at least a portion of the exterior surface of the dielectric tube. 15 . The excimer lamp of claim 1 , further comprising a band pass filter disposed proximate the electrode grid. 16 . A method for providing an excimer lamp comprising: providing a dielectric tube having a closed end and an open end, the dielectric tube defining a cavity; affixing an end cap to cover the open end; introducing a conductive hollow tube into the cavity, the conductive hollow tube passing through the end cap and into the cavity of the dielectric tube, a volume defined between an exterior surface of the conductive hollow tube and an interior surface of the dielectric tube; disposing an electrode grid on an exterior surface of the dielectric tube; and introducing a gas into the volume. 17 . The method of claim 16 , wherein the gas is introduced into the volume via the conductive hollow tube. 18 . The method of claim 16 , further comprising closing the conductive hollow tube on at least one end. 19 . The method of claim 16 , further comprising positioning a cooling tube within the conductive hollow tube. 20 . The method of claim 16 , further comprising: coupling the electrode grid to a ground conductor; and coupling the conductive hollow tube to a positive conductor.
Room floors or walls · CPC title
Apparatus or processes specially adapted for the manufacture {, installation, removal, maintenance} of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps · CPC title
by an external electromagnetic field · CPC title
Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space {(heating or cooling arrangements to promote ionisation for starting H01J61/54)} · CPC title
Ultraviolet [UV] radiation · CPC title
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