Superstrate chuck, method of use, and method of manufacturing an article
US-11776840-B2 · Oct 3, 2023 · US
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Patent family 75586359
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 75586359 |
| Family type | — |
| Earliest priority | Oct 29, 2019 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US11776840B2 — Superstrate chuck, method of use, and method of manufacturing an article |
Representative publication
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US11776840B2 — Superstrate chuck, method of use, and method of manufacturing an article (published Oct 3, 2023)
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