Planarization process, apparatus and method of manufacturing an article

Patent metadata

Field	Value
Publication number	US-2021050245-A1
Application number	US-201916542062-A
Country	US
Kind code	A1
Filing date	Aug 15, 2019
Priority date	Aug 15, 2019
Publication date	Feb 18, 2021
Grant date	—

Abstract

A chuck is provided. The chuck comprises a plurality of lands protruding from a surface of the chuck, the lands defining a series of zones; and a trenched recessed from the surface of the chuck in at least one of the zones.

First claim

What is claimed is:

1 . A chuck, comprising:
a plurality of lands protruding from a surface of the chuck, the lands defining a series of zones; and a trench recessed from the surface of the chuck in at least one of the zones.

2 . The chuck of claim 1 , wherein series of zones includes a peripheral zone immediately adjacent to an outermost land of the plurality of lands and a plurality of inner zones surrounded by the peripheral zone, and the trench is formed in at least one of the inner zones at an area distal to a center of the chuck.

3 . The chuck of claim 2 , wherein the peripheral zone has a width smaller than a width of each of the inner ring zones.

4 . The chuck of claim 2 , wherein the trench in the at least one inner zones has a width less than a half width of the inner zones.

5 . The chuck of claim 2 , wherein a trench is formed in the peripheral zone at an area proximal to the center of the chuck.

6 . The chuck of claim 1 , wherein the series of zones includes a peripheral zone immediately adjacent to an outermost land of the plurality of lands and a plurality of inner zones surrounded by the peripheral zone, and the lands defining the series of inner zones are equally distant from each other.

7 . The chuck of claim 1 , wherein the series of zones include a peripheral zone immediately adjacent to an outermost land of the plurality of lands and a plurality of inner zones surrounded by the peripheral zone, and the outermost land has a height less than a height of the lands defining the inner zones.

8 . The chuck of claim 1 , wherein the trench of each of the zones has a depth at least ten times larger than a height of each of the lands.

9 . The chuck of claim 1 , further comprising a fluid port in fluid communication with the trench.

10 . The chuck of claim 1 , wherein the series of zones are arranged concentrically about a center zone of the chuck.

11 . The chuck of claim 1 , wherein the chuck is configured to retain a substrate, a superstrate, or a wafer to the surface thereof.

12 . The chuck of claim 1 , wherein the chuck is configured to hold a substrate, a superstrate, or a wafer by applying a negative pressure to a zone surrounded by the lands.

13 . A method of using a chuck, comprising:
providing a chuck having a series of zones defined by a plurality of lands protruding from a surface of the chuck and a trenched recessed from the surface of the chuck in at least one of the series of zones; retaining a superstrate on the surface of the chuck; advancing the superstrate to be in contact with a formable material dispensed the substrate; curing the formable material with a curing source; and separating the superstrate from the cured formable material.

14 . The method of claim 12 , wherein the series of zones includes a peripheral zone immediately adjacent to an outermost land of the plurality of lands and a plurality of inner zones surrounded by the peripheral zone, and the trench is formed in each of the inner zones at an area distal to a center of the chuck.

15 . The method of claim 13 , wherein the trench is formed in each of the inner zone with a width less than a half width of each of the inner zone.

16 . The method of claim 13 , wherein the trench is formed in the peripheral zone in an area proximal to the center of the chuck.

17 . The method of claim 13 , wherein the trench is formed in each of the zones with a depth at least ten times larger than a height of each of the lands.

18 . The method of claim 12 , wherein the chuck further includes a vacuum port in fluid communication with each of the trenches.

19 . The method of claim 12 , wherein the series of zones includes a peripheral zone immediately adjacent to an outermost land of the plurality of lands and a plurality of inner zones surrounded by the peripheral zone, wherein the lands defining the series of inner zones are equally distant from each other.

20 . A method of manufacturing an article, comprising:
dispensing a formable material on a substrate; retaining a superstrate with a superstrate chuck, wherein:
the superstrate chuck being defined with a series of zones by a plurality of lands protruding from a surface of thereof; and
a trench recessed from the surface of the superstrate chuck is formed in at least one of the series of zones;
advancing the superstrate to be in contact with a formable material dispensed on the substrate; curing the formable material with a curing source; and separating the superstrate from the cured formable material.

Assignees

• Canon Kk

Inventors

• Choi Byung-Jin
• Bamesberger Seth J
• Im Se-Hyuk

Classifications

• H10P95/06

  Planarisation of inorganic insulating materials · CPC title

• H10P72/76

  using mechanical means, e.g. clamps or pinches · CPC title

• H10P72/7624 Primary

  characterised by the mechanical construction of the susceptor, stage or support · CPC title

• H10P72/0442

  Apparatus for placing on an insulating substrate, e.g. tape · CPC title

• H10P72/78 Primary

  using vacuum or suction, e.g. Bernoulli chucks · CPC title