Photoresist Spectral Sensitivity Matching Radiometer For Trace/Space Width Variation Improvement

Patent metadata

Field	Value
Publication number	US-2019391007-A1
Application number	US-201916446506-A
Country	US
Kind code	A1
Filing date	Jun 19, 2019
Priority date	Jun 25, 2018
Publication date	Dec 26, 2019
Grant date	—

Abstract

A radiometer probe for matching a spectral sensitivity of a dry-film resist is provided. The radiometer probe includes a light probe and a filter-diffuser assembly connected to the light probe. The filter-diffuser assembly includes a filter housing configured to receive an optical diffuser positioned on a filter. The optical diffuser and the filter are separated by a spacer.

First claim

What is claimed is:

1 . A radiometer probe for matching a spectral sensitivity of a dry-film resist comprising:
a light probe; and a filter-diffuser assembly connected to the light probe, the filter-diffuser assembly including a filter housing configured to receive an optical diffuser positioned on a filter, the optical diffuser and the filter are separated by a spacer such that the radiometer probe is configured to expose a pattern on the dry-film resist to form a space between at least one set of adjacent structures of less than 12 microns.

2 . The radiometer probe of claim 1 , wherein the light probe includes an international light probe.

3 . The radiometer probe of claim 1 , wherein the optical diffuser includes a quartz cosine diffuser configured to attenuate the intensity of an exposer to be within a targeted liner range.

4 . The radiometer probe of claim 3 , wherein the optical diffuser includes at least one of opaline glass, Polytetrafluoroethylene (PTFE) or Spectralon that couple to fibers and spectrometers to collect signal from 180° field of view.

5 . The radiometer probe of claim 1 , wherein the optical diffuser includes a top side and an opposing underside, wherein the top side of the optical diffuser includes an etched depression.

6 . The radiometer probe of claim 5 , wherein the optical diffuser is fixed within the filter housing with the etched depression opposing the filter and spacer.

7 . The radiometer probe of claim 1 , wherein the filter includes a metallic coating on a first side and a dielectric coating on an opposing second side.

8 . The radiometer probe of claim 1 , wherein the filter is configured to target a linear range with a transmission value of at least one of: 100% at a 365 nm wavelength, 40% at a 405 nm wavelength, or 7% at a 435 nm wavelength.

9 . The radiometer probe of claim 1 , wherein the filter is positioned within the filter housing such that the dielectric coating is facing opposite the optical diffuser and the spacer.

10 . The radiometer probe of claim 1 , wherein the spacer includes a Teflon® shim configured to prevent interference caused by an air gap between the light probe and the filter.

11 . The radiometer probe of claim 1 , wherein the spacer includes a PTFE shim configured to prevent interference caused by an air gap between the light probe and the filter.

12 . The radiometer probe of claim 1 , wherein the filter-diffuser assembly is connected to the light probe via a thread using a threadlocking adhesive.

13 . A method for calibrating a radiometer probe, the method comprising:
implementing a radiometer probe including a light probe and a filter-diffuser assembly threaded onto the light probe, the filter-diffuser assembly including a filter housing configured to receive an optical diffuser positioned on a filter, wherein the optical diffuser and the filter are separated by a spacer; implementing a light source; and placing the radiometer probe under the light source and measuring an irradiance; comparing the measured irradiance with a standard irradiance; and calibrating the radiometer probe based on the compared measured irradiance with the standard irradiance such that the radiometer probe is configured to expose a pattern on the dry-film resist to form a space between at least one set of adjacent structures of less than 12 microns.

14 . The method of claim 13 , wherein the light probe includes an international light probe.

15 . The method of claim 13 , wherein the optical diffuser includes a quartz cosine diffuser configured to attenuate the intensity of an exposer to be within a targeted liner range.

16 . The method of claim 15 , wherein the optical diffuser includes at least one of opaline glass, Polytetrafluoroethylene (PTFE) or Spectralon that couple to fibers and spectrometers to collect signal from 180° field of view.

17 . The method of claim 13 , wherein the optical diffuser includes a top side and an opposing underside, wherein the top side of the optical diffuser includes an etched depression.

18 . The method of claim 17 , wherein the optical diffuser is fixed within the filter housing with the etched depression opposing the filter and spacer.

19 . The method of claim 13 , wherein the filter includes a metallic coating on a first side and a dielectric coating on an opposing second side.

20 . The method of claim 13 , wherein the filter includes a metallic coating on a first side.

Assignees

• Hutchinson Technology

Inventors

• Lang Matthew S
• Lalonde Lawrence E
• Tobias Kyle T

Classifications

• G01J3/0272

  Handheld · CPC title

• G01J3/0256

  Compact construction · CPC title

• G01J3/0213

  using attenuators · CPC title

• G01J2003/1221

  Mounting; Adjustment · CPC title

• G01J2003/2896

  Vidicon, image intensifier tube · CPC title