Brightness calibration method and optical detection system

Patent metadata

Field	Value
Publication number	US-2016377477-A1
Application number	US-201514859354-A
Country	US
Kind code	A1
Filing date	Sep 21, 2015
Priority date	Jun 26, 2015
Publication date	Dec 29, 2016
Grant date	—

Abstract

A brightness calibration method used in an optical detection system includes a single source illuminator and a probe card. The single source illuminator is configured to illuminate the probe card. The probe card has a plurality of detection sites. The brightness calibration method includes: sequentially detecting brightness values at the detection sites through one of a plurality of diffusers by a sensing chip; sequentially detecting transparencies of the diffusers at one of the detection sites by the sensing chip; and selecting and respectively disposing the diffusers corresponding to larger ones of the transparencies over the detection sites corresponding to smaller ones of the brightness values, and selecting and respectively disposing the diffusers corresponding to smaller ones of the transparencies over the detection sites corresponding to larger ones of the brightness values.

First claim

What is claimed is:

1 . A brightness calibration method used in an optical detection system, the optical detection system comprising a single source illuminator and a probe card, the single source illuminator being configured to illuminate the probe card, the probe card having a plurality of detection sites, the method comprising:
sequentially detecting brightness values at the detection sites through one of a plurality of diffusers by a sensing chip; sequentially detecting transparencies of the d users at one of the detection sites by the sensing chip; and selecting and respectively disposing the diffusers corresponding to larger ones of the transparencies over the detection sites corresponding to smaller ones of the brightness values, and selecting and respectively disposing the diffusers corresponding to smaller ones of the transparencies over the detection sites corresponding to larger ones of the brightness values.

2 . The brightness calibration method of claim 1 , further comprising:
calculating a uniformity ratio of the brightness values; calculating an average transparency of the transparencies; respectively calculating deviation ratios of the transparencies relative to the average transparency; and discarding the diffusers corresponding to the deviation ratios of which absolute values are larger than the uniformity ratio.

3 . The brightness calibration method of claim 1 , wherein the selecting and respectively disposing of the diffusers further comprises:
calculating an average brightness value of the brightness values; calculating an average transparency of the transparencies; and selecting and respectively disposing the diffusers corresponding to the transparencies larger than the average transparency over the detection sites corresponding to the brightness values smaller than the average brightness value, and selecting and respectively disposing the diffusers corresponding to the transparencies smaller than the average transparency over the detection sites corresponding to the brightness values larger than the average brightness value.

4 . The brightness calibration method of claim 1 , wherein the selecting and respectively disposing of the diffusers further comprises:
calculating an average brightness value of the brightness values; equally dividing the transparencies into M transparency groups arranged in a descending sequence, wherein M is a multiple of 2; and selecting and respectively disposing the diffusers corresponding to the N-th transparency group of the transparency groups over the detection sites corresponding to the brightness values smaller than the average brightness value, and selecting and respectively disposing the diffusers corresponding to the (N+M/2)-th transparency group of the transparency groups over the detection sites corresponding to the brightness values larger than the average brightness value, wherein N is a positive integer smaller than or equal to M/2.

5 . The brightness calibration method of claim 4 , wherein the brightness values has a uniformity ratio, and a difference between an upper limit of the N-th transparency group and a lower limit of the (N+M/2)-th transparency group is equal to or smaller than twice as large as the uniformity ratio.

6 . An optical detection system, comprising:
a probe card having a plurality of detection sites; a plurality of diffusers respectively disposed over the detection sites, wherein the diffusers respectively have a plurality of transparencies; and a single source illuminator configured to illuminate the probe card such that lights illuminating to the diffusers have a plurality of brightness values, respectively, wherein the transparencies of the diffusers corresponding to smaller ones of the brightness values are larger, and the transparencies of the diffusers corresponding to larger ones of the brightness values are smaller.

7 . The optical detection system of claim 6 , wherein the brightness values have a uniformity ratio, the transparencies have an average transparency, each of the transparency has a deviation ratio relative to the average transparency, and absolute values of the deviation ratios are equal to or smaller than the uniformity ratio.

8 . The optical detection system of claim 6 , wherein the brightness values have an average brightness value, the transparencies have an average transparency, the transparencies of the diffusers corresponding to the brightness values smaller than the average brightness value are larger than the average transparency, and the transparencies of the diffusers corresponding to the brightness larger than the average brightness value values are smaller than the average transparency.

9 . The optical detection system of claim 6 , wherein the brightness values have an average brightness value, the transparencies are equally divided into M transparency groups arranged in a descending sequence, M is a multiple of 2, the transparencies of the diffusers corresponding to the brightness values smaller than the average brightness value are within the Nth transparency group of the transparency groups, the transparencies of the diffusers corresponding to the brightness larger than the average brightness value values are within the (N+M/2)-th transparency group of the transparency groups, and N is a positive integer smaller than or equal to M/2.

10 . The optical detection system of claim 9 , wherein the brightness values has a uniformity ratio, and a difference between an upper limit of the N-th transparency group and a lower limit of the (N+M/2)-th transparency group is equal to or smaller than twice as large as the uniformity ratio,

Assignees

• Global Unichip Corp
• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Liu Chang-Ming
• Lo Pi-Tsan
• Hsu Shih-Hua
• Lin Chien-Hao
• Lee Teng-Hui
• HSIEH Tsung-Ju

Classifications

• G01J2001/4247

  for testing lamps or other light sources · CPC title

• G01J2001/083

  Testing response of detector · CPC title

• G01J1/08

  Arrangements of light sources specially adapted for photometry {standard sources, also using luminescent or radioactive material} · CPC title

• G01J1/0418

  using attenuators · CPC title

• G01N2201/0634

  Diffuse illumination · CPC title