HIGH BREAKDOWN STRENGTH FERROELECTRIC SrHf03 MATERIALS

US2019229258A1 · US · A1

Patent metadata
FieldValue
Publication numberUS-2019229258-A1
Application numberUS-201916255069-A
CountryUS
Kind codeA1
Filing dateJan 23, 2019
Priority dateJan 23, 2018
Publication dateJul 25, 2019
Grant date

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  1. Title

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  2. Abstract

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  5. First independent claim

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Abstract

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Methods for making metastable lead-free piezoelectric materials are presented herein.

First claim

Opening claim text (preview).

What is claimed is: 1 . A lead-free piezoelectric material capable of maintaining a piezoelectric response (d 33 ) of greater than about 5.2 pm V −1 when subjected to an electric field of about 25 MV/cm. 2 . The material of claim 1 that is capable of a piezoelectric response (e 33 ) of at least 8.8 C m −2 . 3 . The material of claim 1 having an average coercive field of about 83 kVcm −1 and a remnant polarization of about 1.2 μCcm −2 . 4 . The material of claim 1 comprising a metastable polymorph of SrHfO 3 . 5 . The material of claim 4 wherein the polymorph comprises a P4mm phase. 6 . The material of claim 4 having a e ij max of greater than 3 C m −2 . 7 . The material of claim 4 which is ferroelectric. 8 . A ferroelectric induced piezoelectric material having a piezoelectric response (d 33 ) of greater than about 5.2 pm V −1 wherein the piezoelectric material comprises a metastable SrHfO 3 polymorph with a P4mm structure. 9 . The material of claim 8 wherein the polymorph has a breakdown strength of greater than about 25 MV/cm. 10 . The material of claim 8 wherein the polymorph is capable of a piezoelectric response (e 33 ) of at least 8.8 C m −2 . 11 . The material of claim 8 wherein the polymorph is grown on a substrate suitable for epitaxial growth of the polymorph. 12 . The material of claim 8 having an average coercive field of about 83 kVcm −1 and a remnant polarization of about 1.2 μCcm −2 . 13 . The material of claim 8 wherein the polymorph is epitaxially stabilized by a substrate upon which the polymorph is grown. 14 . The polymorph of claim 11 wherein the substrate is SrTiO 3 . 15 . A method for making a lead-free piezoelectric material comprising the steps of identifying a lead-free piezoelectric material having a piezoelectric tensor (e ij max ) of greater than 3 C m −2 by using density functional theory (DFT); and identifying a substrate that is capable of epitaxially stabilizing the piezoelectric material. 16 . The method of claim 15 comprising using pulsed laser deposition to grow epitaxial films from a SrHfO 3 target on a SrTiO 3 substrate. 17 . The method of claim 16 wherein the growth takes place at a temperature of greater than about 450° C. 18 . The method of claim 16 wherein the growth takes place at a total pressure of about 100 mTorr oxygen. 19 . The method of claim 16 wherein the growth takes place by using a pulse rate of the laser of between about 10 and about 40 Hz. 20 . The method of claim 16 wherein the lead-free piezoelectric material has a breakdown strength of greater than about 25 MV/cm. 21 . The method of claim 16 wherein the lead-free piezoelectric material is a film that is capable of a ferroelectric-induced large signal effective converse piezoelectric response of 5.2 pm V −1 . 22 . The method of claim 16 wherein the lead-free piezoelectric material has a response of 5.2 pm V −1 for a 35 nm film, wherein the film comprises a metastable SrHfO 3 polymorph with a P4mm structure. 23 . The method of claim 16 wherein the lead-free piezoelectric material has an average coercive field of about 83 kVcm −1 and a remnant polarization of about 1.2 μCcm −2 .

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Classifications

  • Heating of the material to be evaporated · CPC title

  • defined by measured X-ray, neutron or electron diffraction data · CPC title

  • Compounds of hafnium · CPC title

  • characterised by the substrate · CPC title

  • Other crystal-structural characteristics not specified above · CPC title

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What does patent US2019229258A1 cover?
Methods for making metastable lead-free piezoelectric materials are presented herein.
Who is the assignee on this patent?
Alliance Sustainable Energy, Lawrence Berkeley Nat Laboratory, Penn State Res Found
What technology area does this patent fall under?
Primary CPC classification C30B29/22. Mapped technology areas include Chemistry & Metallurgy.
When was this patent published?
Publication date Thu Jul 25 2019 00:00:00 GMT+0000 (Coordinated Universal Time) (A1). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).