Copper electroplating compositions and methods of electroplating copper on substrates

Patent metadata

Field	Value
Publication number	US-2019136395-A1
Application number	US-201816166198-A
Country	US
Kind code	A1
Filing date	Oct 22, 2018
Priority date	Nov 8, 2017
Publication date	May 9, 2019
Grant date	—

Abstract

Copper electroplating compositions which include an imidazole compound enables the electroplating of copper having uniform morphology on substrates. The composition and methods of enable copper electroplating of photoresist defined features. Such features include pillars, bond pads and line space features.

First claim

What is claimed is:

1 . A composition comprising one or more sources of copper ions; one or more electrolytes; one or more accelerators; one or more suppressors; and one or more imidazole compounds having a formula:

wherein R 1 , R 2 , R 3 , R 4 , R 5 and R 6 are independently chosen from hydrogen;
linear or branched (C 1 -C 4 )alkyl; and phenyl.

2 . The composition of claim 1 , wherein the one or more imidazole compounds are in amounts of 0.25 ppm to 1000 ppm.

3 . The composition of claim 1 , wherein R 1 , R 2 , R 3 , R 4 , R 5 and R 6 are independently chosen from hydrogen; and (C 1 -C 2 )alkyl.

4 . The composition of claim 3 , wherein R 1 , R 2 , R 3 and R 4 are independently chosen from hydrogen; and methyl; and R 5 and R 6 are hydrogen.

5 . A method comprising:
a) providing a substrate; b) providing a copper electroplating composition comprising one or more sources of copper ions; one or more electrolytes; one or more accelerators; one or more suppressors; and one or more imidazole compounds having a formula:

wherein R 1 , R 2 , R 3 , R 4 , R 5 and R 6 are independently chosen from hydrogen; linear or branched (C 1 -C 4 )alkyl; and phenyl;
c) applying the copper electroplating composition to the substrate; and
d) electroplating copper having a uniform morphology on the substrate with the copper electroplating composition.

6 . The method of claim 1 , wherein the substrate comprises photoresist defined features and the photoresist defined features are electroplated with copper during electroplating.

7 . The method of claim 6 , wherein the photoresist defined features on the substrate are chosen from one or more of pillars, bond pads and line space features.

8 . The method of claim 5 , wherein the one or more imidazole compounds are in amounts of 0.25 ppm to 1000 ppm.

9 . The method of claim 5 , wherein electroplating is done at a current density of 0.25 ASD to 40 ASD.

Assignees

• Rohm & Haas Elect Mat

Inventors

• Pokhrel Ravi

Classifications

• H10P76/204

  of organic photoresist masks · CPC title

• H10P14/47

  Electrolytic deposition, i.e. electroplating; Electroless plating · CPC title

• H10W90/724

  between a chip and a stacked insulating package substrate, interposer or RDL · CPC title

• H10W72/07236

  Soldering or alloying · CPC title

• H10W72/01935

  by plating, e.g. electroless plating or electroplating · CPC title