Retaining ring design

Patent metadata

Field	Value
Publication number	US-2019099857-A1
Application number	US-201816149939-A
Country	US
Kind code	A1
Filing date	Oct 2, 2018
Priority date	Oct 4, 2017
Publication date	Apr 4, 2019
Grant date	—

Abstract

Embodiments herein relate to a retaining ring for use in a polishing process. The retaining ring includes an annular body having an upper surface and a lower surface. An inner surface is connected to the upper surface and the lower surface. The inner surface includes one or more surfaces that are used to retain a substrate during processing. The one or more surfaces have an angle relative to a central axis of the retaining ring. The inner surface also includes a plurality of facets. Channels are disposed within the retaining ring to allow passage of a polishing fluid from an inner surface to an outer surface of the retaining ring disposed opposite of the inner surface.

First claim

What is claimed is:

1 . A retaining ring, comprising:
an annular body comprising:
an upper surface;
a lower surface;
an outer surface extending between the upper surface and the lower surface; and an inner surface extending between the upper surface and the lower surface, wherein the inner surface comprises:
a first tapered portion disposed at a first angle relative to a central axis; and

a second tapered portion disposed at a second angle relative to the central axis, and the second tapered portion is coincident with the lower surface at an adjoining edge, wherein a third angle formed between the second tapered portion and the lower surface is either acute or obtuse.

2 . The retaining ring of claim 1 , wherein the first tapered portion has a diameter at a first end greater than a diameter at a second end, the second end adjoining a first end of the second tapered portion and the second tapered portion having a diameter at the second end less than the diameter at the second end of the first tapered portion.

3 . The retaining ring of claim 1 , wherein the first tapered portion has a diameter at a first end greater than a diameter at a second end, the second end adjoining a first end of the second tapered portion and the second tapered portion having a diameter at the second end greater than the diameter at the second end of the first tapered portion.

4 . The retaining ring of claim 2 , wherein the second angle is between 1 degree and 30 degrees towards the central axis.

5 . The retaining ring of claim 3 , wherein the second angle is between 1 degree and 30 degrees away from the central axis.

6 . The retaining ring of claim 1 , further comprising channels disposed within the annular body, wherein the channels have a first opening at the inner surface and a second opening at the outer surface.

7 . The retaining ring of claim 1 , wherein the second tapered portion of the inner surface comprises an array of planar facets that are symmetrically positioned about the central axis.

8 . The retaining ring of claim 1 , wherein the second tapered portion of the inner surface comprises an array of planar facets that are non-radially symmetrical about the central axis.

9 . The retaining ring of claim 7 , wherein the first tapered portion of the inner surface has a frustoconical cross section.

10 . A retaining ring, comprising:
an annular body comprising:
an upper surface;
a lower surface;
an outer surface connected to the upper surface and the lower surface; and
an inner surface connected to the upper surface and the lower surface, wherein the inner surface comprises:
a first planar surface having a first angle relative to a central axis;
a second planar surface having a second angle relative to a central axis; and
a third planar surface disposed between the first planar surface and the second planar surface.

11 . The retaining ring of claim 10 , wherein the first planar surface and the second planar surface each form a taper from a first end to a second end.

12 . The retaining ring of claim 11 , wherein the first planar surface forms an inward taper from the first end to the second end towards a central axis and the second planar surface forms a taper outward from the first end to the second end away from the central axis.

13 . The retaining ring of claim 11 , wherein the first planar surface and the second planar surface each form an inward taper from the first end to the second end towards a central axis.

14 . The retaining ring of claim 12 , wherein the second angle is between 1 degree and 30 degrees.

15 . The retaining ring of claim 13 , wherein the second angle is between 1 degree and 30 degrees.

16 . The retaining ring of claim 10 , further comprising:
one or more channels disposed within the annular body, wherein the channels have a first opening at the inner surface and a second opening at the outer surface.

17 . The retaining ring of claim 10 , wherein the inner surface is symmetric about a central axis.

18 . The retaining ring of claim 10 , wherein the second surface comprises an array of planar facets that are positioned about the central axis.

19 . The retaining ring of claim 10 , wherein the third surface is substantially parallel to the central axis.

20 . A retaining ring, comprising:
an annular body comprising:
an upper surface;
a lower surface;
an outer surface extending between the upper surface and the lower surface;
an inner surface extending between the upper surface and the lower surface, the inner surface comprising:
a first tapered portion disposed at a first angle relative to a central axis;
a second tapered portion having an array of planar facets that are positioned about the central axis, the second tapered portion disposed at a second angle relative to the central axis and coincident with the lower surface at an adjoining edge, wherein the second tapered portion and lower surface define a third angle that is either acute or obtuse;
a plurality of channels disposed within the annular body, wherein the annular channels have a first opening at the inner surface and a second opening at the outer surface; and
an array of planar facets that are positioned about the central axis.

Assignees

• Applied Materials Inc

Inventors

• Oh Jeonghoon
• Garretson Charles C
• Lau Eric
• Nagengast Andrew
• Zuniga Steven M
• Suarez Edwin C
• Zhang Huanbo
• Brown Brian J

Classifications

• H10P72/76

  using mechanical means, e.g. clamps or pinches · CPC title

• B24B37/32 Primary

  Retaining rings · CPC title

• H01L21/687

  Electricity · mapped topic