Photoresist stripping and cleaning composition, method of its preparation and its use
US-9223221-B2 · Dec 29, 2015 · US
US2018321591A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2018321591-A1 |
| Application number | US-201816033236-A |
| Country | US |
| Kind code | A1 |
| Filing date | Jul 12, 2018 |
| Priority date | Jan 14, 2016 |
| Publication date | Nov 8, 2018 |
| Grant date | — |
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A thermosetting coloring composition for manufacturing a color filter for a solid-state imaging element provided with a colored pattern formed by patterning a colored layer by dry etching is provided. The composition contains a pigment (A), a dispersant (B), a thermosetting compound (C), and a solvent (D). A ratio of the pigment (A) to a total solid content of the thermosetting coloring composition is 50 mass percent or more. The dispersant (B) contains a dispersant (b1) having an acidic functional group and/or a dispersant (b2) having a basic functional group. The thermosetting compound (C) contains a glycidyl etherified epoxy compound of sorbitol.
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1 . A thermosetting coloring composition for manufacturing a color filter for a solid-state imaging element provided with a colored pattern formed by patterning a colored layer by dry etching, the composition comprising: a pigment (A), a dispersant (B), a thermosetting compound (C), and a solvent (D), wherein a ratio of the pigment (A) to a total solid content of the thermosetting coloring composition is 50 mass percent or more, the dispersant (B) comprises a dispersant (b1) having an acidic functional group and/or a dispersant (b2) having a basic functional group, and the thermosetting compound (C) comprises a glycidyl etherified epoxy compound of sorbitol. 2 . The thermosetting coloring composition according to claim 1 , wherein the pigment (A) comprises a green pigment (a1). 3 . The thermosetting coloring composition according to claim 2 , wherein the green pigment comprises at least one selected from the group consisting of Pigment Green 7, Pigment Green 36, and Pigment Green 58. 4 . The thermosetting coloring composition according to claim 1 , wherein the solvent (D) comprises a solvent (d1) having a boiling point of 160° C. or higher. 5 . The thermosetting coloring composition according to claim 4 , wherein the solvent (d1) having a boiling point of 160° C. or higher is cyclohexanol acetate. 6 . The thermosetting coloring composition according to claim 1 , wherein the dispersant (B) comprises the dispersant (b1) having the acidic functional group, the dispersant (b1) having the acidic functional group has a segment (b1-A) obtained by polymerizing an ethylenic unsaturated monomer comprising (meth)acrylate, and a theoretical value of a glass transition temperature of the segment (b1-A) is 40° C. or higher. 7 . The thermosetting coloring composition according to claim 6 , wherein the acidic functional group is an aromatic carboxyl group. 8 . The thermosetting coloring composition according to claim 6 , wherein the theoretical value of the glass transition temperature of the segment (b1-A) is 80° C. or higher. 9 . A method of manufacturing a color filter for a solid-state imaging element, the method comprising: (X) forming a colored layer using the thermosetting coloring composition according to claim 1 ; and (Y) patterning the colored layer by dry etching. 10 . The method according to claim 9 , wherein (X) includes (X-1) forming a coating film comprising the thermosetting coloring composition, and (X-2) thermally curing the coating film to obtain the colored layer, and (Y) includes (Y-1) forming a photoresist layer on the colored layer, (Y-2) patterning the photoresist layer by performing exposure and development to obtain a resist pattern, (Y-3) patterning the colored layer by dry etching using the resist pattern as an etching mask to form a colored pattern, and (Y-4) bringing a stripping liquid into contact with the resist pattern to remove the resist pattern from the colored pattern. 11 . The method according to claim 10 , wherein the stripping liquid comprises at least one selected from the group consisting of N-methylpyrrolidone, dimethylsulfoxide, and monoethanolamine.
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