Oxidizing the Source and Doping the Drain of a Thin-Film Transistor
US-2015372150-A1 · Dec 24, 2015 · US
Underlayer film-forming composition and pattern forming process
US9136121B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9136121-B2 |
| Application number | US-201414296168-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 4, 2014 |
| Priority date | Jun 11, 2013 |
| Publication date | Sep 15, 2015 |
| Grant date | Sep 15, 2015 |
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Abstract
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In lithography, a composition comprising a novolak resin comprising recurring units of fluorescein is used to form a photoresist underlayer film. The underlayer film is strippable in alkaline water, without causing damage to ion-implanted Si substrates or SiO 2 substrates.
First claim
Opening claim text (preview).
The invention claimed is: 1. A photoresist underlayer film-forming composition for use in lithography, comprising a novolak resin comprising recurring units having the general formula (1) and a crosslinker: wherein R 1 and R 2 are independently hydrogen, an acid labile group, glycidyl group, or a straight, branched or cyclic C 1 -C 10 alkyl, acyl or alkoxycarbonyl, R…
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Classifications
Electricity · mapped topic
- H10P76/2043Primary
Electricity · mapped topic
Physics · mapped topic
- G03F7/094Primary
Physics · mapped topic
Physics · mapped topic
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Frequently asked questions
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- What does patent US9136121B2 cover?
- In lithography, a composition comprising a novolak resin comprising recurring units of fluorescein is used to form a photoresist underlayer film. The underlayer film is strippable in alkaline water, without causing damage to ion-implanted Si substrates or SiO 2 substrates.
- Who is the assignee on this patent?
- Shinetsu Chemical Co
- What technology area does this patent fall under?
- Primary CPC classification H10P76/2043. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Sep 15 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).