Sintered ceramic protective layer formed by hot pressing

Patent metadata

Field	Value
Publication number	US-2018251406-A1
Application number	US-201815907154-A
Country	US
Kind code	A1
Filing date	Feb 27, 2018
Priority date	Mar 6, 2017
Publication date	Sep 6, 2018
Grant date	—

Abstract

Disclosed herein are methods for fabricating layered ceramic materials via hot pressing. A method includes disposing a powder compact or a ceramic slurry onto a surface of an article, wherein the article is a chamber component of a processing chamber. The powder compact or ceramic slurry is hot pressed against the surface of the article by heating the article and the powder compact or ceramic slurry and applying a pressure of 15-100 Megapascals. The hot pressing sinters the powder compact or ceramic slurry into a sintered ceramic protective layer and bonds the sintered ceramic protective layer to the surface of the article.

First claim

What is claimed is:

1 . A method comprising:
disposing a powder compact on a surface of an article, wherein the article is a chamber component of a processing chamber; hot pressing the powder compact against the surface of the article, the hot pressing comprising:
heating the article and the powder compact to a temperature that is 50-80% of a melting point of the powder compact; and
applying a pressure of 15-100 Megapascals;
wherein the hot pressing sinters the powder compact into a sintered ceramic protective layer and bonds the sintered ceramic protective layer to the surface of the article.

2 . The method of claim 1 , wherein the article comprises a ceramic selected from a group consisting of Al 2 O 3 , AlN, Si 3 N 4 and SiC.

3 . The method of claim 1 , wherein the article comprises a metal selected from a group consisting of aluminum and an aluminum alloy.

4 . The method of claim 1 , wherein the powder compact consists essentially of particles selected from a group consisting of yttrium oxide, yttrium fluoride and yttrium oxy-fluoride.

5 . The method of claim 1 , wherein the powder compact consists essentially of a mixture of yttrium oxide and zirconium oxide.

6 . The method of claim 1 , wherein the powder compact consists essentially of a ceramic compound consisting of Y 4 Al 2 O 9 and an at least one phase composed of Y 2 O 3 —ZrO 2 .

7 . The method of claim 1 , wherein the surface of the article is a non-planar surface, the method further comprising:
placing the article and the powder compact in a mold, wherein applying the pressure comprises applying uniaxial pressure using a punch.

8 . The method of claim 1 , further comprising:
laser cutting the sintered ceramic protective layer to achieve a predefined shape.

9 . The method of claim 1 , further comprising:
disposing an additional powder compact over the sintered ceramic protective layer; and hot pressing the additional powder compact against the sintered ceramic protective layer, wherein the hot pressing of the additional powder compact against the sintered ceramic protective layer sinters the additional powder compact into a second sintered ceramic protective layer and bonds the second sintered ceramic protective layer to the sintered ceramic protective layer.

10 . A method comprising:
applying a ceramic slurry of a first ceramic onto a surface of an article, wherein the article is a chamber component of a processing chamber; hot pressing the ceramic slurry or a green body formed from the ceramic slurry against the surface of the article, the hot pressing comprising:
heating the article and the ceramic slurry or the green body to a temperature that is 50-80% of a melting point of the first ceramic; and
applying a pressure of 15-100 Megapascals;
wherein the hot pressing sinters the ceramic slurry or the green body into a sintered ceramic protective layer and bonds the sintered ceramic protective layer to the surface of the article.

11 . The method of claim 10 , wherein the article comprises a pre-sintered ceramic selected from a group consisting of Al 2 O 3 , AlN, Si 3 N 4 and SiC.

12 . The method of claim 10 , wherein the article comprises a metal selected from a group consisting of aluminum and an aluminum alloy.

13 . The method of claim 10 , wherein the first ceramic is selected from a group consisting of yttrium oxide, yttrium fluoride and yttrium oxy-fluoride.

14 . The method of claim 10 , wherein the first ceramic is selected from a group consisting of a) yttrium oxide and zirconium oxide and b) a ceramic compound consisting of Y 4 Al 2 O 9 and an at least one phase composed of Y 2 O 3 —ZrO 2 .

15 . The method of claim 10 , wherein applying the ceramic slurry onto the surface of the article is performed using one of a dip coating process, a doctor blade process, a spraying process, or a painting process.

16 . The method of claim 10 , wherein the ceramic slurry comprises an organic binder, the method further comprising:
prior to performing the hot pressing, loading the article and the ceramic slurry into a first furnace and heating the article and the ceramic slurry to a first temperature of about 100-200° C. to burn off the organic binder and dry the ceramic slurry to form the green body from the ceramic slurry; and subsequently loading the article and the green body into a second furnace, wherein the hot pressing is performed in the second furnace.

17 . The method of claim 10 , wherein the surface of the article is a non-planar surface, the method further comprising:
placing the article and the ceramic slurry or the green body in a mold, wherein applying the pressure comprises applying uniaxial pressure using a punch.

18 . The method of claim 10 , further comprising:
laser cutting the sintered ceramic protective layer to achieve a predefined shape.

19 . The method of claim 10 , further comprising:
applying an additional ceramic slurry onto the sintered ceramic protective layer; and hot pressing the additional ceramic slurry or an additional green body formed from the second ceramic slurry against the sintered ceramic protective layer, wherein the hot pressing of the ceramic slurry or the additional green body against the sintered ceramic protective layer sinters the additional ceramic slurry or the additional green body into a second sintered ceramic protective layer and bonds the second sintered ceramic protective layer to the sintered ceramic protective layer.

20 . A method comprising:
applying a ceramic welding compound comprising a first ceramic onto a surface of a first sintered ceramic article, wherein the first sintered ceramic article is selected from a group consisting of Al 2 O 3 , AlN, Si 3 N 4 and SiC, and wherein the first sintered ceramic article is a chamber component of a processing chamber; disposing a second sintered ceramic article onto the ceramic welding compound, wherein the second sintered ceramic article is selected from a group consisting of yttrium fluoride, yttrium oxy-fluoride, and a mixture of yttrium oxide and zirconium oxide; and hot pressing the second sintered ceramic article against the first sintered ceramic article, the hot pressing comprising:
heating the first sintered ceramic article and the second sintered ceramic article to a temperature that is 50-80% of a melting point of the first sintered ceramic article and
the second sintered ceramic article; and
applying a pressure of 15-100 Megapascals;
wherein the hot pressing bonds the second sintered ceramic article to the first sintered ceramic article.

Assignees

• Applied Materials Inc

Inventors

• Sun Jennifer Y
• Zhan Guodong
• Fenwick David
• Rice Michael R

Classifications

• B32B9/048

  made of particles · CPC title

• B32B27/14

  next to a particulate layer · CPC title

• B32B3/263

  characterised by a layer having non-uniform thickness · CPC title

• B32B9/005

  comprising one layer of ceramic material, e.g. porcelain, ceramic tile (layered products with at least two ceramic layers composed mainly of ceramic B32B18/00) · CPC title

• B32B5/16

  characterised by features of a layer formed of particles, e.g. chips, powder {or granules (layer formed of natural mineral particles B32B19/00; layer being formed of wood fibres, chips or particles B32B21/02)} · CPC title